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Publications in Math-Net.Ru |
Citations |
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2018 |
| 1. |
A. V. Fadeev, K. V. Rudenko, “Atomic layer deposition of thin films onto 3$D$ nanostructures: the effect of wall tilt angle and aspect ratio of trenches”, Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018), 1573–1580   ; Tech. Phys., 63:10 (2018), 1525–1532 |
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| 2. |
A. V. Fadeev, K. V. Rudenko, “Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio”, Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018), 1264–1272 ; Tech. Phys., 63:8 (2018), 1228–1235 |
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| 3. |
A. V. Fadeev, A. V. Myakon'kikh, K. V. Rudenko, “Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios”, Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018), 243–250 ; Tech. Phys., 63:2 (2018), 235–242 |
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2016 |
| 4. |
V. P. Popov, M. A. Ilnitskii, E. D. Zhanaev, A. V. Myakon'kikh, K. V. Rudenko, A. V. Glukhov, “Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer”, Fizika i Tekhnika Poluprovodnikov, 50:5 (2016), 643–649 ; Semiconductors, 50:5 (2016), 632–638 |
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