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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 8, Pages 1264–1272
DOI: https://doi.org/10.21883/JTF.2018.08.46319.2625 (Mi jtf5851) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Physical electronics

Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio

A. V. Fadeev, K. V. Rudenko

Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
Full-text PDF (152 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2018.08.46319.2625
Abstract: A theoretical model that predicts the thickness of a film grown on the walls of high-aspect-ratio cylindrical hole using the atomic-layer deposition is proposed. The model can be used to calculate the critical time of precursor supply needed for conformal coating of the walls. An analytical model is derived to estimate the minimum time of precursor supply versus parameters of the technological process.
Received: 28.12.2017
English version:
Technical Physics, 2018, Volume 63, Issue 8, Pages 1228–1235
DOI: https://doi.org/10.1134/S1063784218080054
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Fadeev, K. V. Rudenko, “Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio”, Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018), 1264–1272; Tech. Phys., 63:8 (2018), 1228–1235
Citation in format AMSBIB
\Bibitem{FadRud18}
\by A.~V.~Fadeev, K.~V.~Rudenko
\paper Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 8
\pages 1264--1272
\mathnet{http://mi.mathnet.ru/jtf5851}
\crossref{https://doi.org/10.21883/JTF.2018.08.46319.2625}
\elib{https://elibrary.ru/item.asp?id=35269899}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 8
\pages 1228--1235
\crossref{https://doi.org/10.1134/S1063784218080054}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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