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Publications in Math-Net.Ru |
Citations |
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2021 |
| 1. |
V. O. Kuzmenko, A. V. Myakon'kikh, “Low-pressure inductively coupled CF$_{3}$Br plasma studied by the Langmuir probe and optical emission spectroscopy techniques”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:2 (2021), 52–54   ; Tech. Phys. Lett., 47:1 (2021), 99–102 |
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2020 |
| 2. |
A. B. Tolstoguzov, M. N. Drozdov, A. E. Ieshkin, A. A. Tatarintsev, A. V. Myakon'kikh, S. F. Belykh, N. G. Korobeishchikov, V. O. Pelenovich, D. J. Fu, “Influence of the finite-size effect on the cluster ion emission of silicon nanostructures”, Pis'ma v Zh. Èksper. Teoret. Fiz., 111:8 (2020), 531–535 ; JETP Letters, 111:8 (2020), 467–471   |
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2018 |
| 3. |
A. V. Fadeev, A. V. Myakon'kikh, K. V. Rudenko, “Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios”, Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018), 243–250 ; Tech. Phys., 63:2 (2018), 235–242 |
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A. A. Lomov, A. V. Myakon'kikh, Yu. M. Chesnokov, V. V. Denisov, A. N. Kirichenko, V. N. Denisov, “Dose dependence of nanocrystal formation in helium-implanted silicon layers”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:7 (2018), 39–46 ; Tech. Phys. Lett., 44:4 (2018), 291–294 |
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2016 |
| 5. |
V. P. Popov, M. A. Ilnitskii, E. D. Zhanaev, A. V. Myakon'kikh, K. V. Rudenko, A. V. Glukhov, “Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer”, Fizika i Tekhnika Poluprovodnikov, 50:5 (2016), 643–649 ; Semiconductors, 50:5 (2016), 632–638 |
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