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Publications in Math-Net.Ru |
Citations |
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1990 |
1. |
K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, D. R. Ilkayev, V. E. Matyushkov, T. M. Makhviladze, A. A. Shalapenok, “Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator”, Kvantovaya Elektronika, 17:4 (1990), 512–516 [Sov J Quantum Electron, 20:4 (1990), 446–450 ] |
2. |
K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, “Investigation of the characteristics of an excimer laser with a narrow emission line”, Kvantovaya Elektronika, 17:1 (1990), 43–45 [Sov J Quantum Electron, 20:1 (1990), 33–36 ] |
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1989 |
3. |
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, V. A. Nikitaev, A. A. Polyakov, V. E. Tukish, “The procedure of reserved image formation under the impulse laser exhibit of positive VUV resitor of the base of polymethylmethacrylate sensitized by anthracene, and its kinetics”, Matem. Mod., 1:12 (1989), 44–51 |
4. |
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, V. A. Nikitaev, V. E. Tukish, “A method of data processing for the interferometric control of dissolution of resist film”, Matem. Mod., 1:2 (1989), 160–164 |
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1987 |
5. |
V. P. Ageev, I. V. Baranenkov, K. A. Valiev, L. V. Velikov, V. I. Konov, A. I. Maslakov, V. M. Melnikov, A. M. Prokhorov, “Application of metal resinate films in electron- and photolithography”, Dokl. Akad. Nauk SSSR, 294:6 (1987), 1358–1362 |
6. |
K. A. Valiev, L. V. Velikov, A. S. Kramarenko, G. S. Volkov, A. I. Maslakov, “DETERMINATION OF PROJECTED ION FLOW IN POLYMER RESISTS”, Zhurnal Tekhnicheskoi Fiziki, 57:9 (1987), 1858–1860 |
7. |
K. A. Valiev, L. V. Velikov, S. D. Dushenkov, “PORE FORMATION IN THE POLYMETHYLMETHACRYLATE IN THE X-RAY EXPOSING
PROCESS”, Zhurnal Tekhnicheskoi Fiziki, 57:7 (1987), 1445–1448 |
8. |
K. A. Valiev, L. V. Velikov, S. D. Dushenkov, M. I. Ivanova, “Ultraviolet-radiation effect on water-solubility of polymer-films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:24 (1987), 1473–1476 |
9. |
Yu. M. Aleksandrov, K. A. Valiev, L. V. Velikov, S. D. Dushenkov, A. I. Kolomiĭtsev, M. A. Kumakhov, I. Yu. Ponomarev, M. N. Yakimenko, “Transport of soft-x-ray emission along the optical light-guide”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:5 (1987), 257–260 |
10. |
K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, “Coherence of XeCl laser radiation”, Kvantovaya Elektronika, 14:6 (1987), 1266–1268 [Sov J Quantum Electron, 17:6 (1987), 806–808 ] |
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1985 |
11. |
Yu. B. Amerik, K. A. Valiev, L. V. Velikov, S. D. Dushenkov, T. M. Makhviladze, A. M. Prokhorov, L. A. Shirokova, “Direct photo etching of polymers under conditions of macromolecule chain
unzipping”, Dokl. Akad. Nauk SSSR, 280:5 (1985), 1106–1110 |
12. |
K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, A. M. Prokhorov, “High-voltage electron lithography through the pattern former”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1048–1053 |
13. |
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, A. M. Prokhorov, “Nanosecond single-pulsive laser lithography”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1025–1030 |
14. |
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, A. P. Zakharov, A. M. Prokhorov, “Characteristics of the use of pulsed ultraviolet lasers in photolithography”, Kvantovaya Elektronika, 12:12 (1985), 2498–2501 [Sov J Quantum Electron, 15:12 (1985), 1654–1656 ] |
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1984 |
15. |
K. A. Valiev, L. V. Velikov, S. D. Dushenkov, A. M. Prokhorov, M. N. Filippov, “PHOTOETCHING OF PRELIMINARY IRRADIATED POLYMER-FILMS”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 10:10 (1984), 577–581 |
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1983 |
16. |
K. A. Valiev, L. V. Velikov, S. D. Dushenkov, A. V. Mitrofanov, “DOSIMETRY OF SOFT-X-RAY RADIATION AND VACUUM ULTRAVIOLET, BASED ON THE
PHOTOETCHING EFFECT”, Zhurnal Tekhnicheskoi Fiziki, 53:3 (1983), 583–585 |
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1974 |
17. |
L. V. Velikov, Yu. M. Gufan, A. S. Prokhorov, E. G. Rudashevskiĭ, “On the problem of adequate phenomenological description of magnetic dielectrics”, Dokl. Akad. Nauk SSSR, 219:6 (1974), 1341–1344 |
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