K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, “Investigation of the characteristics of an excimer laser with a narrow emission line”, Kvantovaya Elektronika, 17:1 (1990), 43–45 [Sov J Quantum Electron, 20:1 (1990), 33

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Kvantovaya Elektronika, 1990, Volume 17, Number 1, Pages 43–45 (Mi qe4786)

This article is cited in 2 scientific papers (total in 2 papers)

Control of laser radiation parameters

Investigation of the characteristics of an excimer laser with a narrow emission line

K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov

General Physics Institute of the Academy of Sciences of the USSR, Moscow

Full-text PDF (935 kB) Citations (2)

Abstract: An investigation was made of the spatial coherence of excimer lasers in different resonator geometries. Lasing with a spectral width of 5 nm was obtained in a scheme using a grating in the autocollimation regime and a four-prism telescope. A discussion is given of the questions involved in employing excimer lasers having a narrow laser emission line in photolithographic projection systems.

Received: 14.12.1988

English version:
Soviet Journal of Quantum Electronics, 1990, Volume 20, Issue 1, Pages 33–36
DOI: https://doi.org/10.1070/QE1990v020n01ABEH004786

Bibliographic databases:

Document Type: Article

UDC: 621.373.826.038.823

PACS: 42.55.Lt, 42.60.Jf, 42.60.Da, 42.79.Dj, 42.79.Bh

Language: Russian

Citation: K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, “Investigation of the characteristics of an excimer laser with a narrow emission line”, Kvantovaya Elektronika, 17:1 (1990), 43–45 [Sov J Quantum Electron, 20:1 (1990), 33–36]

Linking options:

https://www.mathnet.ru/eng/qe4786

https://www.mathnet.ru/eng/qe/v17/i1/p43

This publication is cited in the following 2 articles:

Yuri Panchenko, Alexey Puchikin, Sofia Yampolskaya, Sergey Bobrovnikov, Evgeniy Gorlov, Victor Zharkov, IEEE J. Quantum Electron., 57:2 (2021), 1
Panchenko Yu.N. Andreev M.V. Losev V.F. Puchikin A.V., International Conference on Atomic and Molecular Pulsed Lasers Xii, Proceedings of Spie, 9810, ed. Tarasenko V. Kabanov A., Spie-Int Soc Optical Engineering, 2015, 981002

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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