Investigation of the characteristics of an excimer laser with a narrow emission line

An investigation was made of the spatial coherence of excimer lasers in different resonator geometries. Lasing with a spectral width of 5 nm was obtained in a scheme using a grating in the autocollimation regime and a four-prism telescope. A discussion is given of the questions involved in employing excimer lasers having a narrow laser emission line in photolithographic projection systems.