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Publications in Math-Net.Ru |
Citations |
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2014 |
1. |
V. M. Borisov, K. N. Koshelev, A. V. Prokof'ev, F. Yu. Khadzhiyskiy, O. B. Khristoforov, “EUV light source with high brightness at 13.5 nm”, Kvantovaya Elektronika, 44:11 (2014), 1077–1082 [Quantum Electron., 44:11 (2014), 1077–1082 ] |
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2010 |
2. |
V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, S. V. Zakharov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “High-power EUV (13.5 nm) light source”, Kvantovaya Elektronika, 40:8 (2010), 720–726 [Quantum Electron., 40:8 (2010), 720–726 ] |
11
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2009 |
3. |
V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits”, Kvantovaya Elektronika, 39:10 (2009), 967–972 [Quantum Electron., 39:10 (2009), 967–972 ] |
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1995 |
4. |
V. M. Borisov, A. A. Dmitriev, A. V. Prokof'ev, O. B. Khristoforov, “Conditions for the excitation of a wide-aperture XeCl laser with an average output radiation power of 1 kW”, Kvantovaya Elektronika, 22:5 (1995), 433–435 [Quantum Electron., 25:5 (1995), 408–410 ] |
4
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1989 |
5. |
V. M. Borisov, D. N. Molchanov, E. A. Morozov, A. V. Prokof'ev, O. B. Khristoforov, “Simple compact 10-J XeCl laser with double Blumlein pulse shaping line”, Kvantovaya Elektronika, 16:11 (1989), 2170–2172 [Sov J Quantum Electron, 19:11 (1989), 1396–1397 ] |
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