1. |
I. Ya. Mittova, V. R. Pshestanchik, “The chemistry of processes which create dielectric layers with functional group substituents on semiconductors by impurity thermo-oxidation”, Usp. Khim., 60:9 (1991), 1898–1919 ; Russian Chem. Reviews, 60:9 (1991), 967–979 |
3
|