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Fadeev, Andrei Valer'evich
Statistics Math-Net.Ru
Total publications:
1
Scientific articles:
1
Number of views:
This page:
52
Abstract pages:
43
Full texts:
8
https://www.mathnet.ru/eng/person189633
List of publications on Google Scholar
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Publications in
Math-Net.Ru
Citations
2018
1.
A. V. Fadeev, A. V. Myakon'kikh, K. V. Rudenko, “Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios”,
Zhurnal Tekhnicheskoi Fiziki
,
88
:2 (2018),
243–250
;
Tech. Phys.
,
63
:2 (2018),
235–242
6
Organisations
Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
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