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This article is cited in 1 scientific paper (total in 1 paper)
Special Issue "Physical Optics and Spectroscopy: Interdisciplinary Research"
Precision optical measurements and metrology
Investigation of the possibility of measuring the radius of mirrors with instruments equipped with wavefront sensors
A. A. Sakharov, T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, E. E. Mukhina, M. V. Vyazovykh Bauman Moscow State Technical University, 105005, Moscow, Russia
Abstract:
A technique has been developed for measuring the radii of curvature of optical parts. A scheme of the device based on a wavefront sensor is proposed, which is characterized by a minimum measurement error. The theoretical substantiation of the measurement technique is given. A number of methods that make it possible to measure the radii of curvature of optical parts are considered. The reasons for an increase in the measurement error are analyzed. The results of measurements according to the given methodology with an original prototype device are considered.
Keywords:
mirror radius, metrology, Shack–Hartmann sensor, wavefront sensor, radius of curvature, measurement technique, measurement errors, Zemax.
Received: 31.05.2019 Revised: 31.05.2019 Accepted: 04.06.2019
Citation:
A. A. Sakharov, T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, E. E. Mukhina, M. V. Vyazovykh, “Investigation of the possibility of measuring the radius of mirrors with instruments equipped with wavefront sensors”, Optics and Spectroscopy, 127:4 (2019), 594–602; Optics and Spectroscopy, 127:4 (2019), 647–655
Linking options:
https://www.mathnet.ru/eng/os580 https://www.mathnet.ru/eng/os/v127/i4/p594
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