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This article is cited in 2 scientific papers (total in 2 papers)
Special Issue "Physical Optics and Spectroscopy: Interdisciplinary Research"
Precision optical measurements and metrology
A methodology for measuring the parameters of large concave aspherical mirrors by means of a wavefront sensor
T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, A. A. Sakharov, V. A. Sokolovskii Bauman Moscow State Technical University, 105005, Moscow, Russia
Abstract:
A methodology has been developed for measuring radius $R_v$ and eccentricity (conic parameter $k$) of large concave aspherical mirrors using a wavefront sensor. Analytical expressions that directly relate Zernike coefficients $a_4$ and $a_9$ to parameters $R_v$ and $k$ of the mirror are obtained. It is shown that the technique does not require accurate mirror alignment before measurements. A computer analysis showed that the developed scheme enables measurements with errors of $\delta R_v<0.1\%$ and $\delta k<0.01$ for mirrors with radii from $100$ to $2000$ mm and with errors of $\delta R_{v}<0.01\%$ and $\delta k<0.001$ for mirrors with radii of more than $5000$ mm.
Keywords:
aspherical surface, aspherical mirror, metrology, Shack–Hartmann sensor, wavefront sensor, radius of curvature, eccentricity, conic parameter, measurement errors, Zemax.
Received: 30.05.2019 Revised: 30.05.2019 Accepted: 04.06.2019
Citation:
T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, A. A. Sakharov, V. A. Sokolovskii, “A methodology for measuring the parameters of large concave aspherical mirrors by means of a wavefront sensor”, Optics and Spectroscopy, 127:4 (2019), 586–593; Optics and Spectroscopy, 127:4 (2019), 639–646
Linking options:
https://www.mathnet.ru/eng/os579 https://www.mathnet.ru/eng/os/v127/i4/p586
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