D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya, “EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations”, Mat. Model., 25:7 (2013), 89–102; Math. Models Comput. Simul., 6:1 (2014), 46

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Matematicheskoe modelirovanie, 2013, Volume 25, Number 7, Pages 89–102 (Mi mm3384)

This article is cited in 3 scientific papers (total in 3 papers)

EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations

D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya

Keldysh Institute of Applied Mathematics RAS, Moscow

Full-text PDF (366 kB) Citations (3)

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Abstract: The model of nonstationary non-equilibrium radiative plasma with accounting for level kinetics and radiative transport in spectral lines is constructed. The modeling of spherical target explosion and emmision as a result of laser pulse is carried out. Numerical calculation of two-temperature 1D Lagrangian equations of gasdynamics is realized. Radiation field and level kinetics are accounted self-consistently by using two different approaches: using interpolation between precalculated tables of spectral parameters and with account of detailed level kinetics included in-line into gasdynamic calculations. The efficiency of extreme ultraviolet source based on lithium and tin laser plasma is estimated. The results have a significant value for EUV-lithography, wich is used in microchip production. Obtained efficiency of EUV-source at optimal parameters of laser pulse is

$\sim1\%$ for lithium and

$\sim5\%$ for tin, that is close to experimental data.

Keywords: detailed level kinetics, extreme ultraviolet, laser produced plasma, radiative gasdynamics.

Received: 24.10.2012

English version:
Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, Pages 46–55
DOI: https://doi.org/10.1134/S2070048214010086

Bibliographic databases:

Document Type: Article

Language: Russian

Citation: D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya, “EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations”, Mat. Model., 25:7 (2013), 89–102; Math. Models Comput. Simul., 6:1 (2014), 46–55

Citation in format AMSBIB

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\paper EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations

\jour Mat. Model.

\yr 2013

\vol 25

\issue 7

\pages 89--102

\mathnet{http://mi.mathnet.ru/mm3384}

\transl

\jour Math. Models Comput. Simul.

\yr 2014

\vol 6

\issue 1

\pages 46--55

\crossref{https://doi.org/10.1134/S2070048214010086}

\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-84925943374}

Linking options:

https://www.mathnet.ru/eng/mm3384

https://www.mathnet.ru/eng/mm/v25/i7/p89

Cycle of papers

EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya
Keldysh Institute preprints, 2012, 51–23
EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya
Mat. Model., 2013, 25:7, 89–102

This publication is cited in the following 3 articles:

A. D. Solomyannaya, I. Yu. Vichev, D. A. Kim, “The ion broadening calculating method for a nonequilibrium plasma”, Keldysh Institute preprints, 2017, 121–20
A. V. Shilkov, “Metod spektralnykh momentov v modelirovanii izluchayuschei stolknovitelnoi plazmy”, Preprinty IPM im. M. V. Keldysha, 2016, 036, 48 pp.
A. D. Solomyannaya, I. Yu. Vichev, “Comparison and analysis of the iron plasma spectra (based on the NLTE9 workshop)”, Keldysh Institute preprints, 2016, 123–27

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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