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Preprints of the Keldysh Institute of Applied Mathematics, 2012, 051, 23 pp. (Mi ipmp69)  

EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations

D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya
References:
Abstract: The model of nonstationary non-equilibrium radiative plasma with accounting for level kinetics and radiative transport in spectral lines is constructed. The modeling of spherical target explosion and emmision as a result of laser pulse is carried out. Numerical calculation of two-temperature 1D Lagrangian equations of gasdynamics is realized. Radiation field and level kinetics are accounted self-consistently by using two different approaches: using interpolation between pre-calculated tables of spectral parameters and with account of detailed level kinetics included in-line into gasdynamic calculations. The efficiency of extreme ultraviolet source based on lithium and tin laser plasma is estimated. The results have a significant value for EUV-lithography, which is used in microchip production. Obtained efficiency of EUV-source at optimal parameters of laser pulse is $\sim 1\%$ for lithium and $\sim 5\%$ for tin, that is close to experimental data.
Document Type: Preprint
Language: Russian
Citation: D. A. Kim, V. G. Novikov, G. V. Dolgoleva, K. N. Koshelev, A. D. Solomyannaya, “EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations”, Keldysh Institute preprints, 2012, 051, 23 pp.
Citation in format AMSBIB
\Bibitem{KimNovDol12}
\by D.~A.~Kim, V.~G.~Novikov, G.~V.~Dolgoleva, K.~N.~Koshelev, A.~D.~Solomyannaya
\paper EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
\jour Keldysh Institute preprints
\yr 2012
\papernumber 051
\totalpages 23
\mathnet{http://mi.mathnet.ru/ipmp69}
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