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Fizika Tverdogo Tela, 2018, Volume 60, Issue 4, Pages 696–700
DOI: https://doi.org/10.21883/FTT.2018.04.45677.183
(Mi ftt9231)
 

This article is cited in 2 scientific papers (total in 2 papers)

Dielectrics

Local anodic oxidation of thin GeO films and formation of nanostructures based on them

K. N. Astankovaa, A. S. Kozhukhovab, I. A. Azarovab, E. B. Gorokhova, D. V. Shcheglova, A. V. Latyshevab

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
Full-text PDF (625 kB) Citations (2)
Abstract: The process of local anodic oxidation of thin GeO films has been studied using an atomic force microscope. The electron-probe microanalysis showed that oxidized areas of a GeO film were germanium dioxide. The effect of the voltage pulse duration applied to the probe–substrate system and the atmospheric humidity on the height of the oxide structures has been studied. The kinetics of the local anodic oxidation (LAO) in a semi-contact mode obeys the Cabrera–Mott model for large times. The initial growth rate of the oxide $(R_{0})$ significantly increases and the time of starting the oxidation $(t_{0})$ decreases as the atmospheric humidity increases by 20%, which is related to an increase in the concentration of oxygen-containing ions at the surface of the oxidized GeO film. It was shown that nanostructures in thin GeO layers can be formed by the LAO method.
Funding agency Grant number
Russian Foundation for Basic Research 16-07-00975
Russian Science Foundation 14-22-00143
Received: 05.06.2017
English version:
Physics of the Solid State, 2018, Volume 60, Issue 4, Pages 700–704
DOI: https://doi.org/10.1134/S1063783418040030
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: K. N. Astankova, A. S. Kozhukhov, I. A. Azarov, E. B. Gorokhov, D. V. Shcheglov, A. V. Latyshev, “Local anodic oxidation of thin GeO films and formation of nanostructures based on them”, Fizika Tverdogo Tela, 60:4 (2018), 696–700; Phys. Solid State, 60:4 (2018), 700–704
Citation in format AMSBIB
\Bibitem{AstKozAza18}
\by K.~N.~Astankova, A.~S.~Kozhukhov, I.~A.~Azarov, E.~B.~Gorokhov, D.~V.~Shcheglov, A.~V.~Latyshev
\paper Local anodic oxidation of thin GeO films and formation of nanostructures based on them
\jour Fizika Tverdogo Tela
\yr 2018
\vol 60
\issue 4
\pages 696--700
\mathnet{http://mi.mathnet.ru/ftt9231}
\crossref{https://doi.org/10.21883/FTT.2018.04.45677.183}
\elib{https://elibrary.ru/item.asp?id=32739840}
\transl
\jour Phys. Solid State
\yr 2018
\vol 60
\issue 4
\pages 700--704
\crossref{https://doi.org/10.1134/S1063783418040030}
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  • https://www.mathnet.ru/eng/ftt/v60/i4/p696
  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Fizika Tverdogo Tela Fizika Tverdogo Tela
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