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Физика и техника полупроводников, 2020, том 54, выпуск 12, страница 1383
(Mi phts6682)
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NANOSTRUCTURES : PHYSICS AND TECHNOLOGY 28th International Symposium (Minsk, Republic of Belarus, September, 2020)
Graphene
Comparative study of conventional and quasi-freestanding epitaxial graphenes grown on 4$H$-SiC substrate
S. P. Lebedeva, I. A. Eliseyeva, V. N. Panteleeva, P. A. Dementeva, V. V. Shnitova, M. K. Rabchinskiia, D. A. Smirnovb, A. V. Zubovc, A. A. Lebedevad a Ioffe Institute, 194021 St. Petersburg, Russia
b Institut für Festkorper und Materialphysik, Technische Universitat Dresden, Dresden, Germany
c St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University),
197101 St. Petersburg, Russia
d St. Petersburg State Electrotechnical University LETI,
197376 St. Petersburg, Russia
Аннотация:
The structural and some other characteristics of quasi-freestanding single-layer graphene obtained by annealing of the buffer layer in the flow of hydrogen are studied in comparison with those of conventional epitaxial graphene. The high structural quality and good lateral uniformity of the thus-obtained graphene film are checked and confirmed by the use of such techniques as Raman spectroscopy, atomic force, and Kelvin probe force microscopies. The confirmation of its single-layer and freestanding character is obtained via the analysis of respective data of $X$-ray photoelectron spectroscopy.
Ключевые слова:
silicon carbide, graphene, KPFM, Raman spectroscopy, XPS.
Поступила в редакцию: 23.06.2020 Исправленный вариант: 23.07.2020 Принята в печать: 27.07.2020
Образец цитирования:
S. P. Lebedev, I. A. Eliseyev, V. N. Panteleev, P. A. Dementev, V. V. Shnitov, M. K. Rabchinskii, D. A. Smirnov, A. V. Zubov, A. A. Lebedev, “Comparative study of conventional and quasi-freestanding epitaxial graphenes grown on 4$H$-SiC substrate”, Физика и техника полупроводников, 54:12 (2020), 1383; Semiconductors, 54:12 (2020), 1657–1660
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/phts6682 https://www.mathnet.ru/rus/phts/v54/i12/p1383
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