Аннотация:
The structural and some other characteristics of quasi-freestanding single-layer graphene obtained by annealing of the buffer layer in the flow of hydrogen are studied in comparison with those of conventional epitaxial graphene. The high structural quality and good lateral uniformity of the thus-obtained graphene film are checked and confirmed by the use of such techniques as Raman spectroscopy, atomic force, and Kelvin probe force microscopies. The confirmation of its single-layer and freestanding character is obtained via the analysis of respective data of X-ray photoelectron spectroscopy.
The authors thank Helmholtz-Zentrum Berlin for the allocation of synchrotron radiation beamtime and the German-Russian Laboratory at BESSY II for the support of our XPS measurements. S.P. Lebedev and I.A. Eliseyev acknowledge the support from RFBR (project 18-02-00498).
Поступила в редакцию: 23.06.2020 Исправленный вариант: 23.07.2020 Принята в печать: 27.07.2020
Образец цитирования:
S. P. Lebedev, I. A. Eliseyev, V. N. Panteleev, P. A. Dementev, V. V. Shnitov, M. K. Rabchinskii, D. A. Smirnov, A. V. Zubov, A. A. Lebedev, “Comparative study of conventional and quasi-freestanding epitaxial graphenes grown on 4H-SiC substrate”, Физика и техника полупроводников, 54:12 (2020), 1383; Semiconductors, 54:12 (2020), 1657–1660
\RBibitem{LebEliPan20}
\by S.~P.~Lebedev, I.~A.~Eliseyev, V.~N.~Panteleev, P.~A.~Dementev, V.~V.~Shnitov, M.~K.~Rabchinskii, D.~A.~Smirnov, A.~V.~Zubov, A.~A.~Lebedev
\paper Comparative study of conventional and quasi-freestanding epitaxial graphenes grown on 4$H$-SiC substrate
\jour Физика и техника полупроводников
\yr 2020
\vol 54
\issue 12
\pages 1383
\mathnet{http://mi.mathnet.ru/phts6682}
\transl
\jour Semiconductors
\yr 2020
\vol 54
\issue 12
\pages 1657--1660
\crossref{https://doi.org/10.1134/S1063782620120179}
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/phts6682
https://www.mathnet.ru/rus/phts/v54/i12/p1383
Эта публикация цитируется в следующих 1 статьяx:
I S Kotousova, S P Lebedev, V V Antipov, A A Lebedev, “Electron diffraction study of the transformation 6√3 reconstruction on 4H–SiC(0001) into quasi-free-standing epitaxial graphene”, Bull Mater Sci, 47:4 (2024)