I. A. Artyukov, L. L. Balakireva, F. Bijkerk, A. V. Vinogradov, N. N. Zorev, I. V. Kozhevnikov, V. V. Kondratenko, O. F. Ogurtsov, A. G. Ponomarenko, A. I. Fedorenko, “Projection x-ray lithography implemented using point sources”, Kvantovaya Elektronika, 19:2 (1992), 114–127 [Sov J Quantum Electron, 22:2 (1992), 99–110]
Contact us: