A. V. Solomonov, S. S. Sakhonenkov, E. O. Filatova, “Study of the Effect of Si and Be Barrier Layers on Crystallization of Cr/Sc Multilayer X-ray Mirror”, Crystallogr. Rep., 69:1 (2024), 58
E.O. Filatova, S.S. Sakhonenkov, A.V. Solomonov, R.M. Smertin, V.N. Polkovnikov, “Increasing the thermal stability of a Cr/Sc multilayer by nitriding”, Applied Surface Science, 644 (2024), 158791
V S Chumak, S Peredkov, A Yu Devizenko, I A Kopylets, Yu P Pershyn, “Reflective x-ray masks for x-ray lithography”, J. Micromech. Microeng., 34:4 (2024), 045008
Aidar U. Gaisin, Elena O. Filatova, “Effect of low-temperature oxidation and heat treatment under vacuum on the Al–Be interdiffusion process”, Phys. Chem. Chem. Phys., 26:2 (2024), 780
А. В. Соломонов, С. С. Сахоненков, Е. О. Филатова, “Изучение влияния барьерных слоев Si и Be на кристаллизацию многослойного рентгеновского зеркала Cr/Sc”, Kristallografiâ, 69:1 (2024), 84
E.O. Filatova, A.V. Karataev, A.U. Gaisin, S.S. Sakhonenkov, V.N. Polkovnikov, N.I. Chkhalo, “Effect of annealing on layer intermixing in nanoscale Cr/Ti multilayers depending on the period value”, Applied Surface Science, 2024, 160839
Ruslan Smertin, Nikolai Chkhalo, Sergey Garakhin, Vladimir Polkovnikov, Sergey Zuev, “Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11 nm wavelength”, Opt. Lett., 49:13 (2024), 3690
N. I. Chkhalo, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov, “Prospective Wavelengths for Projection Lithography Using Synchrotron Radiation”, Tech. Phys., 69:4 (2024), 818
R. A. Shaposhnikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, “Ru/Sr Multilayer Mirrors for the Spectral Range 9–12 nm”, Tech. Phys., 69:3 (2024), 713
A. A. Akhasakhalyan, S. A. Garakhin, F. A. Dar'in, M. V. Zorina, V. V. Kriventsov, D. D. Pershin, A. E. Pestov, R. S. Pleshkov, V. N. Polkovnikov, Ya. V. Rakshun, N. N. Salaschenko, S. S. Svetokhin, M. V. Svechnikov, D. S. Sorokoletov, V. A. Chernov, N. I. Chkhalo, “Manufacturing and Research of Mirrors with a Wide Bandwidth for Synchrotron Applications”, Tech. Phys., 69:3 (2024), 468
S. A. Garakhin, I. G. Zabrodin, S. Yu. Zuev, A. Ya. Lopatin, A. N. Nechai, A. E. Pestov, A. A. Perekalov, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salaschenko, R. M. Smertin, N. N. Tsybin, N. I. Chkhalo, “Measurements of the Absolute Values of the Radiation Intensity in the Wavelength Range of 6.6–32 nm of Stainless Steel Targets with Pulsed Laser Excitation”, Tech. Phys., 69:4 (2024), 870
S. V. Kuzin, S. A. Bogachev, N. F. Erkhova, A. A. Pertsov, I. P. Loboda, A. A. Reva, A. A. Kholodilov, A. S. Ulyanov, A. S. Kirichenko, I. V. Malyshev, A. E. Pestov, V. N. Polkovnikov, M. N. Toropov, N. N. Tsybin, N.I. Chkhalo, V. A. Kryukovskiy, V. N. Gorev, A. A. Doroshkin, A. M. Zadorozhniy, V. Yu. Prokop'ev, “Solar VUV Telescope for Nanosatellites”, Tech. Phys., 69:3 (2024), 595
V. N. Polkovnikov, N. I. Chkhalo, S. A. Garakhin, N. N. Salashchenko, S. Yu. Zuev, “Al/Zr-based multilayer mirrors with record-breaking reflectivity”, Opt. Lett., 49:16 (2024), 4577
S. A. Garakhin, A. Yu. Lopatin, A. N. Nechay, A. A. Perekalov, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, “Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm”, Tech. Phys., 69:6 (2024), 1568
S.S. Sakhonenkov, A.V. Bugaev, R.A. Shaposhnikov, V.N. Polkovnikov, E.O. Filatova, “Chemical interactions at interfaces in nanoscale Mo/B4C multilayered structures”, Surfaces and Interfaces, 55 (2024), 105467
G. D. Antysheva, N. Kumar, R. S. Pleshkov, P. A. Yunin, V. N. Polkovnikov, N. I. Chkhalo, “Study of Reflectivity and Microstructure of Mo/Be Multilayer Mirrors”, Поверхность. Рентгеновские, синхротронные и нейтронные исследования, 2023, № 12, 3
E.O. Filatova, S.S. Sakhonenkov, A.V. Solomonov, R.M. Smertin, V.N. Polkovnikov, “Refined thermal stability of Cr/Sc multilayers with Si(Be) barrier layers”, Applied Surface Science, 611 (2023), 155743
R. M. Smertin, M. M. Barysheva, S. A. Garakhin, M. V. Zorina, S. Yu. Zuev, V. N. Polkovnikov, N. I. Chkhalo, D. B. Radishchev, “Study of the X-Ray Optical and Mechanical Characteristics of C/Si and B<sub>4</sub>C/Si Multilayer Mirrors”, Поверхность. Рентгеновские, синхротронные и нейтронные исследования, 2023, № 12, 39
N. I. Chkhalo, N. N. Salashchenko, “Current State and Prospects for the Development of X-Ray Lithography”, J. Surf. Investig., 17:1 (2023), 307
G. D. Antysheva, N. Kumar, R. S. Pleshkov, P. A. Yunin, V. N. Polkovnikov, N. I. Chkhalo, “Study of the Reflectivity and Microstructure of Mo/Be Multilayer Mirrors”, J. Surf. Investig., 17:6 (2023), 1319