Pulse-periodic 600-W XeCl laser for industrial applications

The results are given of the construction of a high-power excimer laser capable of generating λ = 308-nm radiation with an average power of ~ 600 W. The laser power supply system was based on four commercial thyratrons and a magnetic switch. As an example of an application of such a laser, the results are given of the formation of a structure of apertures in polyimide deposited on aluminum. A binary film of this type serves as a flexible substrate used to mount large-scale integrated circuits.