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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2016, Volume 57, Issue 4, Pages 74–83
DOI: https://doi.org/10.15372/PMTF20160407 (Mi pmtf815) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Convective diffusion from gas to a rotating disk

E. L. Pankratov, P. B. Boldyrevskii

Lobachevsky Nizhny Novgorod State University, Nizhny Novgorod, 603950, Russia
Full-text PDF (235 kB) Citations (2)
DOI: https://doi.org/10.15372/PMTF20160407
Abstract: This paper presents a new method of analytical calculation of the flow rate of the gas mixture and the concentration of the growth component during gas-phase epitaxy in a reaction chamber with a rotating substrate holder disk. The concentration of the growth component is analyzed in relation to a number of epitaxy process parameters.
Keywords: epitaxy from gas phase, convective diffusion, substrate holder disk.
Received: 31.03.2014
Revised: 28.05.2015
English version:
Journal of Applied Mechanics and Technical Physics, 2016, Volume 57, Issue 4, Pages 637–645
DOI: https://doi.org/10.1134/S0021894416040076
Bibliographic databases:
Document Type: Article
UDC: 533.7: 533.22
Language: Russian
Citation: E. L. Pankratov, P. B. Boldyrevskii, “Convective diffusion from gas to a rotating disk”, Prikl. Mekh. Tekh. Fiz., 57:4 (2016), 74–83; J. Appl. Mech. Tech. Phys., 57:4 (2016), 637–645
Citation in format AMSBIB
\Bibitem{PanBol16}
\by E.~L.~Pankratov, P.~B.~Boldyrevskii
\paper Convective diffusion from gas to a rotating disk
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2016
\vol 57
\issue 4
\pages 74--83
\mathnet{http://mi.mathnet.ru/pmtf815}
\crossref{https://doi.org/10.15372/PMTF20160407}
\elib{https://elibrary.ru/item.asp?id=26493341}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2016
\vol 57
\issue 4
\pages 637--645
\crossref{https://doi.org/10.1134/S0021894416040076}
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  • https://www.mathnet.ru/eng/pmtf/v57/i4/p74
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Prikladnaya Mekhanika i Tekhnicheskaya Fizika Prikladnaya Mekhanika i Tekhnicheskaya Fizika
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