Prikladnaya Mekhanika i Tekhnicheskaya Fizika
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Prikl. Mekh. Tekh. Fiz.:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2016, Volume 57, Issue 4, Pages 74–83
DOI: https://doi.org/10.15372/PMTF20160407 (Mi pmtf815) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Convective diffusion from gas to a rotating disk

E. L. Pankratov, P. B. Boldyrevskii

Lobachevsky Nizhny Novgorod State University, Nizhny Novgorod, 603950, Russia
Full-text PDF (235 kB) Citations (2)
DOI: https://doi.org/10.15372/PMTF20160407
Abstract: This paper presents a new method of analytical calculation of the flow rate of the gas mixture and the concentration of the growth component during gas-phase epitaxy in a reaction chamber with a rotating substrate holder disk. The concentration of the growth component is analyzed in relation to a number of epitaxy process parameters.
Keywords: epitaxy from gas phase, convective diffusion, substrate holder disk.
Received: 31.03.2014
Revised: 28.05.2015
English version:
Journal of Applied Mechanics and Technical Physics, 2016, Volume 57, Issue 4, Pages 637–645
DOI: https://doi.org/10.1134/S0021894416040076
Bibliographic databases:
Document Type: Article
UDC: 533.7: 533.22
Language: Russian
Citation: E. L. Pankratov, P. B. Boldyrevskii, “Convective diffusion from gas to a rotating disk”, Prikl. Mekh. Tekh. Fiz., 57:4 (2016), 74–83; J. Appl. Mech. Tech. Phys., 57:4 (2016), 637–645
Citation in format AMSBIB
\Bibitem{PanBol16}
\by E.~L.~Pankratov, P.~B.~Boldyrevskii
\paper Convective diffusion from gas to a rotating disk
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2016
\vol 57
\issue 4
\pages 74--83
\mathnet{http://mi.mathnet.ru/pmtf815}
\crossref{https://doi.org/10.15372/PMTF20160407}
\elib{https://elibrary.ru/item.asp?id=26493341}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2016
\vol 57
\issue 4
\pages 637--645
\crossref{https://doi.org/10.1134/S0021894416040076}
Linking options:
  • https://www.mathnet.ru/eng/pmtf815
  • https://www.mathnet.ru/eng/pmtf/v57/i4/p74
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Prikladnaya Mekhanika i Tekhnicheskaya Fizika Prikladnaya Mekhanika i Tekhnicheskaya Fizika
    Statistics & downloads:
    Abstract page:26
    Full-text PDF :9
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024