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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2009, Volume 50, Issue 2, Pages 145–151 (Mi pmtf1726)  
This article is cited in 8 scientific papers (total in 8 papers)

Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors

V. A. Selezneva, V. Ya. Prinza, V. M. Aniskinb, A. A. Maslovb

a Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090, Russia
b Khristianovich Institute of Theoretical and Applied Mechanics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090, Russia
Full-text PDF (1908 kB) Citations (8)
Abstract: A new method is proposed for creating “smart” surfaces for suppressing turbulence and retaining a laminar supersonic flow. Methods of formation of super-fast-response sensors and actuators for such surfaces are developed. Such sensors and actuators are structurally designed as microtubes made of SiO22/Si3N4/Au and InGaAs/GaAs/Au heterofilms and suspended above a substrate; the wall thickness of these tubes is in the nanometer range; the tubes are connected to electrical contacts. Models of distributed arrays of tubular microsensors and microactuators are fabricated in a single technological process, which involves the well-established planar technology and the technology of rolling of stressed heterofilms.
Keywords: tubular sensors and actuators, arrays of microtubes, flow control.
Received: 25.10.2007
Accepted: 24.12.2007
English version:
Journal of Applied Mechanics and Technical Physics, 2009, Volume 50, Issue 2, Pages 291–296
DOI: https://doi.org/10.1007/s10808-009-0039-5
Bibliographic databases:
Document Type: Article
UDC: 533
Language: Russian
Citation: V. A. Seleznev, V. Ya. Prinz, V. M. Aniskin, A. A. Maslov, “Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors”, Prikl. Mekh. Tekh. Fiz., 50:2 (2009), 145–151; J. Appl. Mech. Tech. Phys., 50:2 (2009), 291–296
Citation in format AMSBIB
\Bibitem{SelPriAni09}
\by V.~A.~Seleznev, V.~Ya.~Prinz, V.~M.~Aniskin, A.~A.~Maslov
\paper Generation and registration of disturbances in a gas flow. 1.~Formation of arrays of tubular microheaters and microsensors
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2009
\vol 50
\issue 2
\pages 145--151
\mathnet{http://mi.mathnet.ru/pmtf1726}
\elib{https://elibrary.ru/item.asp?id=11839338}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2009
\vol 50
\issue 2
\pages 291--296
\crossref{https://doi.org/10.1007/s10808-009-0039-5}
Linking options:
  • https://www.mathnet.ru/eng/pmtf1726
  • https://www.mathnet.ru/eng/pmtf/v50/i2/p145
    • This publication is cited in the following 8 articles:
    1. Ke Wu, Gang Wang, Xin Li, Yasuo Liu, “Aeroelastic flutter analysis of tilted curved nanopipe in supersonic flow”, Mechanics of Advanced Materials and Structures, 2023, 1  crossref
    2. Valery Ya. Rudyak, Vladimir M. Aniskin, Anatoly A. Maslov, Andrey V. Minakov, Sergey G. Mironov, Fluid Mechanics and Its Applications, 118, Micro- and Nanoflows, 2018, 57  crossref
    3. V.Ya. Prinz, Advances in Semiconductor Nanostructures, 2017, 463  crossref
    4. Wen Huang, Seid Koric, Xin Yu, K. Jimmy Hsia, Xiuling Li, “Precision Structural Engineering of Self-Rolled-up 3D Nanomembranes Guided by Transient Quasi-Static FEM Modeling”, Nano Lett., 14:11 (2014), 6293  crossref
    5. Paul Froeter, Xin Yu, Wen Huang, Frank Du, Moyang Li, Iksu Chun, Seung Hyun Kim, Kuen J Hsia, John A Rogers, Xiuling Li, “3D hierarchical architectures based on self-rolled-up silicon nitride membranes”, Nanotechnology, 24:47 (2013), 475301  crossref
    6. Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz, Alexander Vladimirovich Kopylov, “3D heterostructures and systems for novel MEMS/NEMS”, Science and Technology of Advanced Materials, 10:3 (2009), 034502  crossref
    7. Vladimir A. Seleznev, Victor Ya. Prinz, Vladimir A. Aniskin, Alexander N. Shiplyuk, 2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies, 2009, 74  crossref
    8. A. N. Shiplyuk, V. M. Aniskin, V. A. Seleznev, V. Ya. Prinz, A. A. Maslov, R. S. Matvienko, “Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors”, J. Appl. Mech. Tech. Phys., 50:3 (2009), 454–458  mathnet  mathnet  crossref
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