Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors

A new method is proposed for creating “smart” surfaces for suppressing turbulence and retaining a laminar supersonic flow. Methods of formation of super-fast-response sensors and actuators for such surfaces are developed. Such sensors and actuators are structurally designed as microtubes made of SiO$_2$/Si$_3$N$_4$/Au and InGaAs/GaAs/Au heterofilms and suspended above a substrate; the wall thickness of these tubes is in the nanometer range; the tubes are connected to electrical contacts. Models of distributed arrays of tubular microsensors and microactuators are fabricated in a single technological process, which involves the well-established planar technology and the technology of rolling of stressed heterofilms.