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Fizika i Tekhnika Poluprovodnikov, 2017, Volume 51, Issue 6, Pages 850–854
DOI: https://doi.org/10.21883/FTP.2017.06.44567.8455 (Mi phts6145) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Manufacturing, processing, testing of materials and structures

Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering

V. F. Kobziev, R. M. Zakirova, N. V. Kostenkov, P. N. Krilov, I. V. Fedotova

Udmurt State University, Izhevsk
Full-text PDF (648 kB) Citations (2)
DOI: https://doi.org/10.21883/FTP.2017.06.44567.8455
Abstract: The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.
Received: 22.11.2016
Accepted: 28.11.2016
English version:
Semiconductors, 2017, Volume 51, Issue 6, Pages 817–822
DOI: https://doi.org/10.1134/S1063782617060161
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. F. Kobziev, R. M. Zakirova, N. V. Kostenkov, P. N. Krilov, I. V. Fedotova, “Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering”, Fizika i Tekhnika Poluprovodnikov, 51:6 (2017), 850–854; Semiconductors, 51:6 (2017), 817–822
Citation in format AMSBIB
\Bibitem{KobZakKos17}
\by V.~F.~Kobziev, R.~M.~Zakirova, N.~V.~Kostenkov, P.~N.~Krilov, I.~V.~Fedotova
\paper Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2017
\vol 51
\issue 6
\pages 850--854
\mathnet{http://mi.mathnet.ru/phts6145}
\crossref{https://doi.org/10.21883/FTP.2017.06.44567.8455}
\elib{https://elibrary.ru/item.asp?id=29404955}
\transl
\jour Semiconductors
\yr 2017
\vol 51
\issue 6
\pages 817--822
\crossref{https://doi.org/10.1134/S1063782617060161}
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  • https://www.mathnet.ru/eng/phts/v51/i6/p850
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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