|
This article is cited in 2 scientific papers (total in 2 papers)
Manufacturing, processing, testing of materials and structures
Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering
V. F. Kobziev, R. M. Zakirova, N. V. Kostenkov, P. N. Krilov, I. V. Fedotova Udmurt State University, Izhevsk
Abstract:
The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.
Received: 22.11.2016 Accepted: 28.11.2016
Citation:
V. F. Kobziev, R. M. Zakirova, N. V. Kostenkov, P. N. Krilov, I. V. Fedotova, “Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering”, Fizika i Tekhnika Poluprovodnikov, 51:6 (2017), 850–854; Semiconductors, 51:6 (2017), 817–822
Linking options:
https://www.mathnet.ru/eng/phts6145 https://www.mathnet.ru/eng/phts/v51/i6/p850
|
Statistics & downloads: |
Abstract page: | 28 | Full-text PDF : | 8 |
|