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Fizika i Tekhnika Poluprovodnikov, 2017, Volume 51, Issue 6, Pages 844–849
DOI: https://doi.org/10.21883/FTP.2017.06.44566.8379
(Mi phts6144)
 

This article is cited in 4 scientific papers (total in 4 papers)

Manufacturing, processing, testing of materials and structures

Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing

È. Yu. Buchin, V. V. Naumov, S. V. Vasilev

Yaroslavl branch of the Institute of physics and technology, Institution of Russian academy of sciences
Abstract: It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu$_3$Si phase.
Received: 26.07.2016
Accepted: 28.11.2016
English version:
Semiconductors, 2017, Volume 51, Issue 6, Pages 812–816
DOI: https://doi.org/10.1134/S1063782617060069
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: È. Yu. Buchin, V. V. Naumov, S. V. Vasilev, “Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing”, Fizika i Tekhnika Poluprovodnikov, 51:6 (2017), 844–849; Semiconductors, 51:6 (2017), 812–816
Citation in format AMSBIB
\Bibitem{BucNauVas17}
\by \`E.~Yu.~Buchin, V.~V.~Naumov, S.~V.~Vasilev
\paper Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2017
\vol 51
\issue 6
\pages 844--849
\mathnet{http://mi.mathnet.ru/phts6144}
\crossref{https://doi.org/10.21883/FTP.2017.06.44566.8379}
\elib{https://elibrary.ru/item.asp?id=29404954}
\transl
\jour Semiconductors
\yr 2017
\vol 51
\issue 6
\pages 812--816
\crossref{https://doi.org/10.1134/S1063782617060069}
Linking options:
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  • https://www.mathnet.ru/eng/phts/v51/i6/p844
  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Fizika i Tekhnika Poluprovodnikov Fizika i Tekhnika Poluprovodnikov
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