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Fizika i Tekhnika Poluprovodnikov, 2019, Volume 53, Issue 9, Pages 1293–1296
DOI: https://doi.org/10.21883/FTP.2019.09.48142.26
(Mi phts5420)
 

XXIII International symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11–14, 2019

Enhanced photoluminescence of heavily doped $n$-Ge/Si(001) layers

D. S. Prokhorova, V. G. Shengurova, S. A. Denisova, D. O. Filatova, A. V. Zdoroveyshcheva, V. Yu. Chalkova, A. V. Zaitseva, M. V. Veda, M. V. Dorokhina, N. A. Baidakovab

a Lobachevsky State University of Nizhny Novgorod
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract: The photoluminescence spectra of epitaxial $n^+$-Ge:P/Si(001) structures are studied. The structures are grown by hot-wire chemical vapor deposition and doped with phosphorus to the maximum electron concentration 1 $\times$ 10$^{20}$ cm$^{-3}$ from a source based on thermally decomposed GaP. The effects of the doping level and rapid thermal annealing of $n^+$-Ge:P layers on the photoluminescence spectra are studied. It is demonstrated that the epitaxial $n^+$-Ge:P/Si(001) layers grown by hot-wire chemical vapor deposition are promising for application as active regions of light-emitting optoelectronic devices operating in the near-infrared spectral region.
Keywords: epitaxial germanium layers on silicon, hot-wire chemical vapor deposition, doping, photoluminescence.
Funding agency Grant number
Russian Science Foundation 18-72-10061
The study was supported by the Russian Science Foundation, project no. 18-72-10061.
Received: 24.04.2019
Revised: 29.04.2019
Accepted: 29.04.2019
English version:
Semiconductors, 2019, Volume 53, Issue 9, Pages 1262–1265
DOI: https://doi.org/10.1134/S1063782619090161
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. S. Prokhorov, V. G. Shengurov, S. A. Denisov, D. O. Filatov, A. V. Zdoroveyshchev, V. Yu. Chalkov, A. V. Zaitsev, M. V. Ved, M. V. Dorokhin, N. A. Baidakova, “Enhanced photoluminescence of heavily doped $n$-Ge/Si(001) layers”, Fizika i Tekhnika Poluprovodnikov, 53:9 (2019), 1293–1296; Semiconductors, 53:9 (2019), 1262–1265
Citation in format AMSBIB
\Bibitem{ProSheDen19}
\by D.~S.~Prokhorov, V.~G.~Shengurov, S.~A.~Denisov, D.~O.~Filatov, A.~V.~Zdoroveyshchev, V.~Yu.~Chalkov, A.~V.~Zaitsev, M.~V.~Ved, M.~V.~Dorokhin, N.~A.~Baidakova
\paper Enhanced photoluminescence of heavily doped $n$-Ge/Si(001) layers
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2019
\vol 53
\issue 9
\pages 1293--1296
\mathnet{http://mi.mathnet.ru/phts5420}
\crossref{https://doi.org/10.21883/FTP.2019.09.48142.26}
\elib{https://elibrary.ru/item.asp?id=41129885}
\transl
\jour Semiconductors
\yr 2019
\vol 53
\issue 9
\pages 1262--1265
\crossref{https://doi.org/10.1134/S1063782619090161}
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