Morphology and phase composition of nanostructured carbon coatings, formed on the sublayer based on polytetrafluoroethylene and lead formate

The features of the morphology and phase composition of carbon coatings deposited on sublayers based on polytetrafluoroethylene and lead formate of various compositions have been determined. The effect of the mass ratio of the components of the initial target used for the deposition of the sublayer and the heat treatment of carbon coatings on their morphology and phase composition has been established. The efficiency of using metal oxides and carbonized polymer layers for a given change in the phase composition and relief of carbon coatings is estimated.