A. M. Chekushkin, L. V. Filippenko, A. A. Lomov, D. Liu, Sh.-C. Shi, V. P. Koshelets, “Optimization of fabrication processes for Nb, NbN, NbTiN films and high-quality tunnel junctions for terahertz receiving circuits”, Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1577–1582
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