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Zhikharev, Evgeny Nikolaevich

Statistics Math-Net.Ru
Total publications: 2
Scientific articles: 2

Number of views:
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References:69
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Biography

Researcher in Institute of Physics and Technology of RAS (IPT RAS), in 1975 graduated from Physical department of Moscow State University. Area of scientific interests: scanning electron microscopy, electron lithography and related fields.


https://www.mathnet.ru/eng/person116720
List of publications on Google Scholar
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Publications in Math-Net.Ru Citations
2017
1. A. E. Rogozhin, M. A. Bruk, E. N. Zhikharev, F. A. Sidorov, “Nanophotonic structure formation by dry e-beam etching of the resist: resolution limitation origins”, Computer Optics, 41:4 (2017),  499–503  mathnet 4
2015
2. M. A. Bruk, E. N. Zhikharev, D. R. Streltsov, V. A. Kalnov, A. V. Spirin, A. E. Rogozhin, “Some peculiarities of a new method of microrelief creation by the direct electron-beam etching of resist”, Computer Optics, 39:2 (2015),  204–210  mathnet 4

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