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Optics and Spectroscopy, 2020, Volume 128, Issue 8, Pages 1133–1143
DOI: https://doi.org/10.21883/OS.2020.08.49711.79-20
(Mi os334)
 

This article is cited in 2 scientific papers (total in 2 papers)

Physical optics

Spectrophotometry of layers on plane parallel substrates

A. B. Sotskia, S. S. Mikheeva, N. I. Stas’kova, L. I. Sotskayab

a Mogilev State A. A. Kuleshov University
b Belarusian-Russian University
Full-text PDF (505 kB) Citations (2)
Abstract: Integral expressions are obtained for the reflectance and transmittance spectra of a structure that is formed by two thin layers deposited on opposite faces of a plane-parallel substrate and that is obliquely illuminated with partially coherent light. As a result of an asymptotic analysis of the integrals, approximate analytical formulas are found for calculating the indicated spectra, which are convenient for use to solve inverse spectrophotometry problems. An aluminum doped zinc oxide layer deposited on a glass substrate is studied. The spectra of the refractive indices and absorbances of the layer and the substrate, as well as the layer thickness, are restored by processing the reflectance and transmittance spectra of the structure measured for $s$- and $p$-polarized waves at two angles of incidence of the light on the structure. The found parameters of the structure are used in computational experiments to estimate the applicability limits of the formulated approximations.
Keywords: spectrophotometry, partial coherence, inverse optical problem, reflectance, transmittance.
Funding agency Grant number
State Research programs Photonics and Opto- and Microelectronics 20161316
This work was performed within the framework of state assignment 1.3.03 “Development of the theory of optical monitoring methods for nanoscale thin-film structures”, the State Program of Scientific Research of the Republic of Belarus “Photonics, Optoelectronics, and Microelectronics”, state registration number 20161316.
Received: 05.03.2020
Revised: 05.03.2020
Accepted: 28.03.2020
English version:
Optics and Spectroscopy, 2020, Volume 128, Issue 8, Pages 1155–1166
DOI: https://doi.org/10.1134/S0030400X20080354
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. B. Sotski, S. S. Mikheev, N. I. Stas’kov, L. I. Sotskaya, “Spectrophotometry of layers on plane parallel substrates”, Optics and Spectroscopy, 128:8 (2020), 1133–1143; Optics and Spectroscopy, 128:8 (2020), 1155–1166
Citation in format AMSBIB
\Bibitem{SotMikSta20}
\by A.~B.~Sotski, S.~S.~Mikheev, N.~I.~Stas’kov, L.~I.~Sotskaya
\paper Spectrophotometry of layers on plane parallel substrates
\jour Optics and Spectroscopy
\yr 2020
\vol 128
\issue 8
\pages 1133--1143
\mathnet{http://mi.mathnet.ru/os334}
\crossref{https://doi.org/10.21883/OS.2020.08.49711.79-20}
\elib{https://elibrary.ru/item.asp?id=44045919}
\transl
\jour Optics and Spectroscopy
\yr 2020
\vol 128
\issue 8
\pages 1155--1166
\crossref{https://doi.org/10.1134/S0030400X20080354}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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