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This article is cited in 3 scientific papers (total in 3 papers)
The new mathematical model for the analysis of subtle substrate imperfections
A. V. Baryshev, Yu. A. Eremin Lomonosov Moscow State University
Abstract:
A novel mathematical model for the analysis subtle substrate imperfections such as flat pit and bump in a substrate has been proposed. An investigation has been carried out and the result of the application of the model has been obtained in the case of three-dimensional scattering problem for different types of substrate imperfections.
Keywords:
substrate imperfections, scattering problem.
Received: 07.09.2009
Citation:
A. V. Baryshev, Yu. A. Eremin, “The new mathematical model for the analysis of subtle substrate imperfections”, Mat. Model., 22:5 (2010), 122–130
Linking options:
https://www.mathnet.ru/eng/mm2978 https://www.mathnet.ru/eng/mm/v22/i5/p122
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Abstract page: | 396 | Full-text PDF : | 134 | References: | 54 | First page: | 7 |
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