Abstract:
Monophase films of the metastable cubic phase TixSiyNz(O) with the B1 structure have been synthesized; introduction of silicon atoms into the non-metallic sublattice of titanium oxynitride has been proved experimentally and theoretically.
Document Type:
Article
Language: English
Citation:
M. V. Kuznetsov, E. V. Shalaeva, S. V. Borisov, B. V. Mitrofanov, A. L. Ivanovskii, G. P. Shveikin, “Cubic Solid-solution TixSiyNz(O) Films: Synthesis, Structure and Electronic Properties”, Mendeleev Commun., 5:3 (1995), 94–96
Linking options:
https://www.mathnet.ru/eng/mendc5046
https://www.mathnet.ru/eng/mendc/v5/i3/p94
This publication is cited in the following 4 articles:
Stefanie Spitz, Michael Stueber, Harald Leiste, Sven Ulrich, Hans Juergen Seifert, “Phase formation and microstructure evolution of reactively r.f. magnetron sputtered Cr–Zr oxynitride thin films”, Surface and Coatings Technology, 237 (2013), 149
E.V Shalaeva, S.V Borisov, O.F Denisov, M.V Kuznetsov, “Metastable phase diagram of Ti–Si–N(O) films ( C Si <30 at.”, Thin Solid Films, 339:1-2 (1999), 129
A. L. Ivanovskii, “Ternary carbides and nitrides based on transition metals and subgroup IIIB, IVB elements: electronic structure and chemical bonding”, Russian Chem. Reviews, 65:6 (1996), 461–478
M. V. KUZNETSOV, E. V. SHALAEVA, S. V. BORISOV, B. V. MITROFANOV, A. L. IVANOVSKY, G. P. SHVEIKIN, “ChemInform Abstract: Cubic Solid‐Solution TixSiyNz(O) Films: Synthesis, Structure and Electronic Properties.”, ChemInform, 26:40 (1995)
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