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Fizika Tverdogo Tela, 2016, Volume 58, Issue 5, Pages 1011–1018 (Mi ftt9994)  

This article is cited in 19 scientific papers (total in 19 papers)

Surface physics, thin films

Effect of interaction in the Ga–As–O system on the morphology of a GaAs surface during molecular-beam epitaxy

O. A. Ageev, S. V. Balakirev, M. S. Solodovnik, M. M. Eremenko

Institute of Nanotechnologies, Electronics and Equipment Engineering
Abstract: A thermodynamic analysis of processes of interphase interaction in the Ga–As–O system has been performed and their theoretical laws have been determined, taking into account nonlinear thermal physical properties of the compounds, the oxide film compositions, and modes of molecular-beam epitaxy of GaAs. The processes of interaction of the native oxide of GaAs with the substrate material and also with Ga and As$_4$ from a vapor gaseous phase have been studied experimentally. The experimental results correlate with the results of the thermodynamic analysis. The laws of influence of the removal of the proper oxide on the evolution of the GaAs surface morphology under conditions of the molecular-beam epitaxy have been proposed.
Keywords: GaAs, Oxide Film, GaAs Surface, Gallium Oxide, RHEED Pattern.
Received: 18.08.2015
English version:
Physics of the Solid State, 2016, Volume 58, Issue 5, Pages 1045–1052
DOI: https://doi.org/10.1134/S1063783416050024
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: O. A. Ageev, S. V. Balakirev, M. S. Solodovnik, M. M. Eremenko, “Effect of interaction in the Ga–As–O system on the morphology of a GaAs surface during molecular-beam epitaxy”, Fizika Tverdogo Tela, 58:5 (2016), 1011–1018; Phys. Solid State, 58:5 (2016), 1045–1052
Citation in format AMSBIB
\Bibitem{AgeBalSol16}
\by O.~A.~Ageev, S.~V.~Balakirev, M.~S.~Solodovnik, M.~M.~Eremenko
\paper Effect of interaction in the Ga--As--O system on the morphology of a GaAs surface during molecular-beam epitaxy
\jour Fizika Tverdogo Tela
\yr 2016
\vol 58
\issue 5
\pages 1011--1018
\mathnet{http://mi.mathnet.ru/ftt9994}
\elib{https://elibrary.ru/item.asp?id=27368627}
\transl
\jour Phys. Solid State
\yr 2016
\vol 58
\issue 5
\pages 1045--1052
\crossref{https://doi.org/10.1134/S1063783416050024}
Linking options:
  • https://www.mathnet.ru/eng/ftt9994
  • https://www.mathnet.ru/eng/ftt/v58/i5/p1011
  • This publication is cited in the following 19 articles:
    1. Maxim S. Solodovnik, Danil V. Kirichenko, Denis D. Dukhan, Natalia E. Chernenko, Ivan S. Makhov, Nikita A. Shandyba, Mikhail M. Eremenko, Natalia V. Kryzhanovskaya, Sergey V. Balakirev, “New way to nanopattern GaAs surface for subcritical formation of InAs quantum dots”, Applied Surface Science, 2025, 162373  crossref
    2. S. V. Balakirev, N. E. Chernenko, E. A. Lakhina, D. V. Kirichenko, N. A. Shandyba, D. D. Dukhan, M. M. Eremenko, M. S. Solodovnik, “Influence of Local Droplet Etching Modes on the Transformation of Nanoholes Formed by Focused Ion Beams on a GaAs(111) Surface”, Nanotechnol Russia, 19:S1 (2024), S37  crossref
    3. Nikita Shandyba, Danil Kirichenko, Vladislav Sharov, Natalia Chernenko, Sergey Balakirev, Maxim Solodovnik, “Modulation of GaAs nanowire growth by pre-treatment of Si substrate using a Ga focused ion beam”, Nanotechnology, 34:46 (2023), 465603  crossref
    4. S V Balakirev, M S Solodovnik, M M Eremenko, N E Chernenko, O A Ageev, “Kinetic Monte Carlo simulation of the growth of In nanostructures by droplet epitaxy on AlGaAs nanopatterned surfaces”, J. Phys.: Conf. Ser., 1695:1 (2020), 012016  crossref
    5. N E Chernenko, S V Balakirev, M M Eremenko, M S Solodovnik, “Effect of the Al content in the substrate on the In nanodroplets growth by droplet epitaxy”, J. Phys.: Conf. Ser., 1695:1 (2020), 012012  crossref
    6. M M Eremenko, M S Solodovnik, S V Balakirev, N E Chernenko, I N Kots, O A Ageev, “GaAs epitaxial growth on modified on-axis Si(001) substrates”, J. Phys.: Conf. Ser., 1695:1 (2020), 012013  crossref
    7. N E Chernenko, S V Balakirev, M M Eremenko, M S Solodovnik, “Effect of morphology features of patterned surface on the nucleation processes of In/GaAs nanostructures during droplet epitaxy”, J. Phys.: Conf. Ser., 1410:1 (2019), 012007  crossref
    8. I A Mikhaylin, S V Balakirev, M M Eremenko, N E Chernenko, M S Solodovnik, “Arsenic background pressure effect on In droplet morphology”, J. Phys.: Conf. Ser., 1410:1 (2019), 012051  crossref
    9. Songphol Kanjanachuchai, Thipusa Wongpinij, Chanan Euaruksakul, Pat Photongkam, “Au-catalyzed desorption of GaAs oxides”, Nanotechnology, 30:21 (2019), 215703  crossref
    10. S V Balakirev, M M Eremenko, N E Chernenko, O A Ageev, M S Solodovnik, “Role of the wetting layer in the crystallization stage during droplet epitaxy of InAs/GaAs nanostructures”, J. Phys.: Conf. Ser., 1410:1 (2019), 012059  crossref
    11. M M Eremenko, S V Balakirev, N E Chernenko, O A Ageev, M S Solodovnik, “XPS analysis of metallic wetting layer in In/GaAs system obtained at different growth temperatures”, J. Phys.: Conf. Ser., 1410:1 (2019), 012045  crossref
    12. S. A. Lisitsyn, S. V. Balakirev, V. I. Avilov, A. S. Kolomiytsev, V. S. Klimin, M. S. Solodovnik, B. G. Konoplev, O. A. Ageev, “Study of Nanoscale Profiling Modes of GaAs Epitaxial Structures by Focused Ion Beams”, Nanotechnol Russia, 13:1-2 (2018), 26  crossref
    13. I N Kots, V S Klimin, V V Polyakova, A A Rezvan, Z E Vakulov, O A Ageev, “Masking coating formation by the focused ion beams method for plasma chemical treatment”, J. Phys.: Conf. Ser., 1124 (2018), 081035  crossref
    14. S V Balakirev, M M Eremenko, I A Mikhaylin, M S Solodovnik, “Study of the geometrical parameters of In nanostructures during droplet epitaxy on the As-stabilized GaAs(001) surface”, J. Phys.: Conf. Ser., 1124 (2018), 022025  crossref
    15. S V Balakirev, M M Eremenko, I A Mikhaylin, V S Klimin, M S Solodovnik, “Droplet epitaxy of In/AlGaAs nanostructures on the As-stabilized surface”, J. Phys.: Conf. Ser., 1124 (2018), 022018  crossref
    16. Sergey V. Balakirev, Maxim S. Solodovnik, Oleg A. Ageev, “Hybrid Analytical–Monte Carlo Model of In/GaAs(001) Droplet Epitaxy: Theory and Experiment”, Physica Status Solidi (b), 255:4 (2018)  crossref
    17. S V Balakirev, M S Solodovnik, I A Mikhaylin, M M Eremenko, O A Ageev, “Analytical–Monte Carlo model of the growth of In nanostructures during droplet epitaxy on the triangle-patterned GaAs substrates”, J. Phys.: Conf. Ser., 1124 (2018), 022001  crossref
    18. V S Klimin, R V Tominov, A V Eskov, S Y Krasnoborodko, O A Ageev, “The influence of the chemical and physical component of the plasma etching of the surface of gallium arsenide on the etching rate in the chloride plasma of the combined discharge”, J. Phys.: Conf. Ser., 917 (2017), 092005  crossref
    19. M S Solodovnik, S V Balakirev, M M Eremenko, I A Mikhaylin, V I Avilov, S A Lisitsyn, O A Ageev, “Droplet epitaxy of GaAs nanostructures on the As-stabilized GaAs(001) surface”, J. Phys.: Conf. Ser., 917 (2017), 032037  crossref
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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