Abstract:
The influence of the bias voltage polarity Us on microstructure, crystallographic texture and magnetic properties has been investigated for Ni films with a thickness of ≈ 15–420 nm, which are obtained via magnetron sputtering at a working gas pressure P corresponding to the collision-deficient flight mode of atoms of the sputtered target between the target and the substrate. The Ni(111)-textured films have been shown to form at Us≈ -100 V, whose microstructure and magnetic parameters are almost unchanged with a thickness. In contrast, the Ni(200) films are formed at Us≈ +100 V, whose magnetic properties and micro-structure depend significantly on the thickness d that manifests in a critical thickness d∗≈ 150 nm, when the structure of the film becomes inhomogeneous in the thickness, the remagnetization loops are changed from rectangular to supercritical with the formation of the band domain structure.
Citation:
A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov, “Effect of bias voltage polarity of a substrate on the texture, microstructure, and magnetic properties of Ni films prepared by magnetron sputtering”, Fizika Tverdogo Tela, 58:6 (2016), 1206–1215; Phys. Solid State, 58:6 (2016), 1247–1256
\Bibitem{DzhNikFil16}
\by A.~S.~Dzhumaliev, Yu.~V.~Nikulin, Yu.~A.~Filimonov
\paper Effect of bias voltage polarity of a substrate on the texture, microstructure, and magnetic properties of Ni films prepared by magnetron sputtering
\jour Fizika Tverdogo Tela
\yr 2016
\vol 58
\issue 6
\pages 1206--1215
\mathnet{http://mi.mathnet.ru/ftt9966}
\elib{https://elibrary.ru/item.asp?id=27368660}
\transl
\jour Phys. Solid State
\yr 2016
\vol 58
\issue 6
\pages 1247--1256
\crossref{https://doi.org/10.1134/S1063783416060135}
Linking options:
https://www.mathnet.ru/eng/ftt9966
https://www.mathnet.ru/eng/ftt/v58/i6/p1206
This publication is cited in the following 6 articles:
T. S. Ogneva, A. A. Ruktuev, N. Yu. Cherkasova, Yu. N. Malyutina, M. N. Khomyakov, V. G. Burov, I. A. Bataev, “NiAl Coatings Produced by Magnetron Sputtering from Mosaic Targets”, J. of Materi Eng and Perform, 33:4 (2024), 1718
Jiaojiao Du, Guojian Li, Mengmeng Li, Jianhao Wang, Yang Gao, Qiang Wang, “Effect of High Magnetic Field on the Growth, Magnetic, and Electrical Properties of Nanocrystalline Ni Films with Different Thicknesses and Growth Rates”, Physica Status Solidi (a), 215:13 (2018)
A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov, “Effect of the Pressure of Working Gas on the Microcrystalline Structure and Magnetic Properties of the Co Film Deposited with the Aid of Magnetron Sputtering”, J. Commun. Technol. Electron., 63:1 (2018), 80
A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov, “Influence of annealing and argon pressure on the microcrystalline structure of magnetron-sputtered textured cobalt films”, Tech. Phys., 63:11 (2018), 1678–1686
A. S. Dzhumaliev, Yu. V. Nikulin, “Vliyanie davleniya argona na teksturu i mikrostrukturu plenok kobalta, osazhdaemykh magnetronnym raspyleniem”, Izv. Sarat. un-ta. Nov. cer. Ser. Fizika, 17:4 (2017), 254–262