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This article is cited in 1 scientific paper (total in 1 paper)
Surface physics, thin films
Gas release in the process of thermal treatment of sputtered Pb(Ti$_{0.48}$Zr$_{0.52}$)O$_{x}$ films
A. G. Znamenskiia, A. M. Ionovb, V. A. Marchenkoa a Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Moscow oblast, Russia
b Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Moscow region
Abstract:
The conditions (regimes of deposition and thermal treatment) for gas bubble formation in ferroelectric Pb(Ti$_{1-y}$Zr$_{y}$)O$_{3}$ films have been determined by thermal desorption and electron and optical micros-copy. A mechanism of bubble formation has been proposed. This mechanism rests upon the notion that lead can form oxides of the PbO$_2$ type with a high oxygen content at relatively low temperatures and that these oxides break down with the release of oxygen to lower oxides of the PbO type upon subsequent heating. These ideas have been taken as the basis of a technique for the fabrication of Pb(Ti$_{1-y}$Zr$_{y}$)O$_{3}$ films with a reduced (by an order of magnitude) density of through defects.
Received: 21.07.2015 Revised: 02.09.2015
Citation:
A. G. Znamenskii, A. M. Ionov, V. A. Marchenko, “Gas release in the process of thermal treatment of sputtered Pb(Ti$_{0.48}$Zr$_{0.52}$)O$_{x}$ films”, Fizika Tverdogo Tela, 58:6 (2016), 1198–1205; Phys. Solid State, 58:6 (2016), 1239–1246
Linking options:
https://www.mathnet.ru/eng/ftt9965 https://www.mathnet.ru/eng/ftt/v58/i6/p1198
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