Specific features of the atomic structure of metallic layers of multilayered (CoFeZr/SiO$_{2}$)$_{32}$ and (CoFeZr/$a$-Si)$_{40}$ nanostructures with different interlayers

Multilayered nanostructures (MN) were prepared by ion-beam successive sputtering from two targets, one of which was a metallic Co$_{45}$Fe$_{45}$Zr$_{10}$ alloy plate and another target was a quartz (SiO$_2$) or silicon plate on the surface of a rotating glass-ceramic substrate in an argon atmosphere. The Co and Fe $K$ edges X-ray absorption fine structure of XANES in the (CoFeZr/SiO$_{2}$)$_{32}$ sample with oxide interlayers was similar to XANES of metallic Fe foil. This indicated the existence in metallic layers of multilayered CoFeZr nanocrystals with a local environment similar to the atomic environment in solid solutions on the base of bcc Fe structure, which is also confirmed by XRD data. XANES near the Co and Fe K edges absorption in another multilayered nanostructure with silicon interlayers (CoFeZr/$a$-Si)$_{40}$ differs from XANES of MN with dielectric SiO$_2$ interlayer, which demonstrates a dominant influence of the Fe–Si and Co–Si bonds in the local environment of 3$d$ Co and Fe metals when they form CoFeSi-type silicide phases in thinner bilayers of this MN.