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This article is cited in 3 scientific papers (total in 3 papers)
Low dimensional systems
Chemical and phase compositions of multilayer nanoperiodic $a$-SiO$_{x}$/ZrO$_{2}$ structures subjected to high-temperature annealing
A. V. Boryakov, S. I. Surodin, D. E. Nikolichev, A. V. Ershov Lobachevsky State University of Nizhny Novgorod
Abstract:
The chemical and the phase compositions of multilayer nanoperiodic SiO$_{x}$/ZrO$_{2}$ structures prepared by vacuum evaporation from separated sources and subjected to high-temperature annealing have been studied by X-ray photoelectron spectroscopy with a layer-by-layer etching. It is found that, under deposition conditions used, the silicon suboxide layers had the stoichiometric coefficient $x\sim$1.8 and the zirconium-containing layers were the stoichiometric zirconium dioxide. It was found, using X-ray photoelectron spectroscopy, that annealing of the multilayer structures at 1000$^\circ$C leads to mutual diffusion of the components and chemical interaction between ZrO$_2$ and SiO$_{x}$ with predominant formation of zirconium silicate at heteroboundaries of the structures. The SiO$_{x}$ layers of the annealed nanostructures contained $\sim$5 at % elemental silicon as a result of the phase separation and the formation of fine silicon nanocrystals.
Received: 10.10.2016
Citation:
A. V. Boryakov, S. I. Surodin, D. E. Nikolichev, A. V. Ershov, “Chemical and phase compositions of multilayer nanoperiodic $a$-SiO$_{x}$/ZrO$_{2}$ structures subjected to high-temperature annealing”, Fizika Tverdogo Tela, 59:6 (2017), 1183–1191; Phys. Solid State, 59:6 (2017), 1206–1214
Linking options:
https://www.mathnet.ru/eng/ftt9558 https://www.mathnet.ru/eng/ftt/v59/i6/p1183
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