|
This article is cited in 1 scientific paper (total in 1 paper)
Surface physics, thin films
Phase formation and electronic structure peculiarities in the Al$_{1-x}$Si$_{x}$ film composites under the conditions of magnetron and ion-beam sputtering
V. A. Terekhov, D. S. Usol'tseva, O. V. Serbin, I. E. Zanin, T. V. Kulikova, D. N. Nesterov, K. A. Barkov, A. V. Sitnikov, S. K. Lazaruk, È. P. Domashevskaya Voronezh State University
Abstract:
The peculiarities of the phase composition and electronic structure of aluminum–silicon composite films near the Al$_{0.75}$Si$_{0.25}$ composition obtained by the magnetron and ion-beam sputtering methods on a Si(100) silicon substrate are studied using the X-ray diffraction techniques and ultrasoft X-ray emission spectroscopy. In addition to silicon nanocrystals of about 25 nm in size, an ordered solid solution corresponding to the previously unknown Al$_3$Si phase is formed in magnetron sputtering on a polycrystalline Al matrix. Films obtained by ion-beam sputtering of the composite target are found to be monophasic and contained only one phase of an ordered solid solution of aluminum silicide Al$_3$Si of the Pm3m cubic system with the primitive cell parameter $a$ = 4.085 $\mathring{\mathrm{A}}$. However, subsequent pulsed photon annealing of the composite with different radiation doses from 145 to 216 J/cm$^2$ gives rise to the partial decomposition of the Al$_3$Si phase with the formation of free metallic aluminum and silicon nanocrystals with sizes in the range from 50 to 100 nm, depending on the pulsed photon radiation dose.
Received: 14.06.2017
Citation:
V. A. Terekhov, D. S. Usol'tseva, O. V. Serbin, I. E. Zanin, T. V. Kulikova, D. N. Nesterov, K. A. Barkov, A. V. Sitnikov, S. K. Lazaruk, È. P. Domashevskaya, “Phase formation and electronic structure peculiarities in the Al$_{1-x}$Si$_{x}$ film composites under the conditions of magnetron and ion-beam sputtering”, Fizika Tverdogo Tela, 60:5 (2018), 1005–1011; Phys. Solid State, 60:5 (2018), 1021–1028
Linking options:
https://www.mathnet.ru/eng/ftt9215 https://www.mathnet.ru/eng/ftt/v60/i5/p1005
|
Statistics & downloads: |
Abstract page: | 38 | Full-text PDF : | 9 |
|