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Fizika Tverdogo Tela, 2019, Volume 61, Issue 12, Pages 2454–2460
DOI: https://doi.org/10.21883/FTT.2019.12.48608.47ks (Mi ftt8593) 		 
International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Surface physics and thin films

Ion-beam and X-ray methods of elemental diagnostics of thin film coatings

V. K. Egorova, E. V. Egorovabc, M. S. Afanasievc

a Institute of Microelectronics Technology Problems and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia
b Financial University under the Government of the Russian Federation, Moscow
c Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Full-text PDF (638 kB)
DOI: https://doi.org/10.21883/FTT.2019.12.48608.47ks
Abstract: We show how the combined use of the methods of Rutherford backscattering of ions and X-ray fluorescence analysis under conditions of total external reflection of the flow of exciting hard X-ray radiation and registration of the X-ray radiation output during ion excitation allows to effectively diagnose the elemental composition of thin-film coatings and films of dry residues of liquids. These methods and the features of their experimental application are briefly described. Examples of the complex methodological analysis of real objects are given. The possibility of increasing the efficiency of the methods of X-ray fluorescence analysis of materials due to the inclusion in the X-ray optical schemes of experimental measurements of flat X-ray waveguide resonators is indicated.
Keywords: Rutherford backscatter, X-ray fluorescence diagnostics, X-ray fluorescence analysis, thin-film coatings, films of dry solids.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 075-00475-19-00
Russian Foundation for Basic Research 19-07-00271
18-029-11029
The work was performed as part of the State assignment no. 075-00475-19-00 and was partially supported by the Russian Foundation for Basic Research, project nos. 19-07-00271 and 18-029-11029.
Received: 16.07.2019
Revised: 16.07.2019
Accepted: 25.07.2019
English version:
Physics of the Solid State, 2019, Volume 61, Issue 12, Pages 2480–2486
DOI: https://doi.org/10.1134/S1063783419120114
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. K. Egorov, E. V. Egorov, M. S. Afanasiev, “Ion-beam and X-ray methods of elemental diagnostics of thin film coatings”, Fizika Tverdogo Tela, 61:12 (2019), 2454–2460; Phys. Solid State, 61:12 (2019), 2480–2486
Citation in format AMSBIB
\Bibitem{EgoEgoAfa19}
\by V.~K.~Egorov, E.~V.~Egorov, M.~S.~Afanasiev
\paper Ion-beam and X-ray methods of elemental diagnostics of thin film coatings
\jour Fizika Tverdogo Tela
\yr 2019
\vol 61
\issue 12
\pages 2454--2460
\mathnet{http://mi.mathnet.ru/ftt8593}
\crossref{https://doi.org/10.21883/FTT.2019.12.48608.47ks}
\elib{https://elibrary.ru/item.asp?id=42571154}
\transl
\jour Phys. Solid State
\yr 2019
\vol 61
\issue 12
\pages 2480--2486
\crossref{https://doi.org/10.1134/S1063783419120114}
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