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International Conference ''Mechanisms and Nonlinear Problems of Nucleation, Growth of Crystals and Thin Films'' dedicated to the memory of the outstanding theoretical physicist Professor V.V. Slezov (Proceedings) St. Petersburg, July 1-5, 2019
Surface physics and thin films
Ion-beam and X-ray methods of elemental diagnostics of thin film coatings
V. K. Egorova, E. V. Egorovabc, M. S. Afanasievc a Institute of Microelectronics Technology Problems and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia
b Financial University under the Government of the Russian Federation, Moscow
c Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
Abstract:
We show how the combined use of the methods of Rutherford backscattering of ions and X-ray fluorescence analysis under conditions of total external reflection of the flow of exciting hard X-ray radiation and registration of the X-ray radiation output during ion excitation allows to effectively diagnose the elemental composition of thin-film coatings and films of dry residues of liquids. These methods and the features of their experimental application are briefly described. Examples of the complex methodological analysis of real objects are given. The possibility of increasing the efficiency of the methods of X-ray fluorescence analysis of materials due to the inclusion in the X-ray optical schemes of experimental measurements of flat X-ray waveguide resonators is indicated.
Keywords:
Rutherford backscatter, X-ray fluorescence diagnostics, X-ray fluorescence analysis, thin-film coatings, films of dry solids.
Received: 16.07.2019 Revised: 16.07.2019 Accepted: 25.07.2019
Citation:
V. K. Egorov, E. V. Egorov, M. S. Afanasiev, “Ion-beam and X-ray methods of elemental diagnostics of thin film coatings”, Fizika Tverdogo Tela, 61:12 (2019), 2454–2460; Phys. Solid State, 61:12 (2019), 2480–2486
Linking options:
https://www.mathnet.ru/eng/ftt8593 https://www.mathnet.ru/eng/ftt/v61/i12/p2454
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Statistics & downloads: |
Abstract page: | 35 | Full-text PDF : | 11 |
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