Fizika Tverdogo Tela
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Fizika Tverdogo Tela:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Fizika Tverdogo Tela, 2020, Volume 62, Issue 10, Pages 1612–1617
DOI: https://doi.org/10.21883/FTT.2020.10.49905.116 (Mi ftt8281) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Semiconductors

Control of properties of diamond-like silicon–carbon films

A. I. Popovab, A. D. Barinovab, V. M. Yemetsa, T. S. Chukanovaa, M. L. Shupegina

a National Research University "Moscow Power Engineering Institute"
b Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow, Russia
Full-text PDF (242 kB) Citations (7)
DOI: https://doi.org/10.21883/FTT.2020.10.49905.116
Abstract: The possibilities of controlling the electrophysical and mechanical properties of amorphous diamond-like silicon-carbon films by the methods of structural, chemical and structural-chemical modification are considered. The factors of the structural modification were the bias voltage and its frequency during the synthesis of films, the argon pressure in the vacuum chamber, and precursors with different molecular structures. For chemical and structural-chemical modification, transition metals were introduced into the film with a concentration of up to 30–35 at.% The high efficiency of controlling the physical properties of the films by the considered methods is shown.
Keywords: silicon-carbon films, polyphenylmethylsiloxane, polymethylsiloxane, structural chemical and structural-chemical modification, nanocomposites, electrical conductivity, nanohardness.
Funding agency Grant number
Russian Foundation for Basic Research 19-07-00021
This study was performed with financial support of the Russian Foundation for Basic Research (grant no. 19-07-00021).
Received: 28.05.2020
Revised: 28.05.2020
Accepted: 04.06.2020
English version:
Physics of the Solid State, 2020, Volume 62, Issue 10, Pages 1780–1786
DOI: https://doi.org/10.1134/S1063783420100261
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. I. Popov, A. D. Barinov, V. M. Yemets, T. S. Chukanova, M. L. Shupegin, “Control of properties of diamond-like silicon–carbon films”, Fizika Tverdogo Tela, 62:10 (2020), 1612–1617; Phys. Solid State, 62:10 (2020), 1780–1786
Citation in format AMSBIB
\Bibitem{PopBarYem20}
\by A.~I.~Popov, A.~D.~Barinov, V.~M.~Yemets, T.~S.~Chukanova, M.~L.~Shupegin
\paper Control of properties of diamond-like silicon–carbon films
\jour Fizika Tverdogo Tela
\yr 2020
\vol 62
\issue 10
\pages 1612--1617
\mathnet{http://mi.mathnet.ru/ftt8281}
\crossref{https://doi.org/10.21883/FTT.2020.10.49905.116}
\elib{https://elibrary.ru/item.asp?id=44041037}
\transl
\jour Phys. Solid State
\yr 2020
\vol 62
\issue 10
\pages 1780--1786
\crossref{https://doi.org/10.1134/S1063783420100261}
Linking options:
  • https://www.mathnet.ru/eng/ftt8281
  • https://www.mathnet.ru/eng/ftt/v62/i10/p1612
    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Fizika Tverdogo Tela Fizika Tverdogo Tela
    Statistics & downloads:
    Abstract page:52
    Full-text PDF :34
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024