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Fizika Tverdogo Tela, 2020, Volume 62, Issue 10, Pages 1612–1617
DOI: https://doi.org/10.21883/FTT.2020.10.49905.116 (Mi ftt8281) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Semiconductors

Control of properties of diamond-like silicon–carbon films

A. I. Popovab, A. D. Barinovab, V. M. Yemetsa, T. S. Chukanovaa, M. L. Shupegina

a National Research University "Moscow Power Engineering Institute"
b Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow, Russia
Full-text PDF (242 kB) Citations (7)
DOI: https://doi.org/10.21883/FTT.2020.10.49905.116
Abstract: The possibilities of controlling the electrophysical and mechanical properties of amorphous diamond-like silicon-carbon films by the methods of structural, chemical and structural-chemical modification are considered. The factors of the structural modification were the bias voltage and its frequency during the synthesis of films, the argon pressure in the vacuum chamber, and precursors with different molecular structures. For chemical and structural-chemical modification, transition metals were introduced into the film with a concentration of up to 30–35 at.% The high efficiency of controlling the physical properties of the films by the considered methods is shown.
Keywords: silicon-carbon films, polyphenylmethylsiloxane, polymethylsiloxane, structural chemical and structural-chemical modification, nanocomposites, electrical conductivity, nanohardness.
Funding agency Grant number
Russian Foundation for Basic Research 19-07-00021
This study was performed with financial support of the Russian Foundation for Basic Research (grant no. 19-07-00021).
Received: 28.05.2020
Revised: 28.05.2020
Accepted: 04.06.2020
English version:
Physics of the Solid State, 2020, Volume 62, Issue 10, Pages 1780–1786
DOI: https://doi.org/10.1134/S1063783420100261
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. I. Popov, A. D. Barinov, V. M. Yemets, T. S. Chukanova, M. L. Shupegin, “Control of properties of diamond-like silicon–carbon films”, Fizika Tverdogo Tela, 62:10 (2020), 1612–1617; Phys. Solid State, 62:10 (2020), 1780–1786
Citation in format AMSBIB
\Bibitem{PopBarYem20}
\by A.~I.~Popov, A.~D.~Barinov, V.~M.~Yemets, T.~S.~Chukanova, M.~L.~Shupegin
\paper Control of properties of diamond-like silicon–carbon films
\jour Fizika Tverdogo Tela
\yr 2020
\vol 62
\issue 10
\pages 1612--1617
\mathnet{http://mi.mathnet.ru/ftt8281}
\crossref{https://doi.org/10.21883/FTT.2020.10.49905.116}
\elib{https://elibrary.ru/item.asp?id=44041037}
\transl
\jour Phys. Solid State
\yr 2020
\vol 62
\issue 10
\pages 1780--1786
\crossref{https://doi.org/10.1134/S1063783420100261}
Linking options:
  • https://www.mathnet.ru/eng/ftt8281
  • https://www.mathnet.ru/eng/ftt/v62/i10/p1612
    • This publication is cited in the following 7 articles:
    1. A. I. Popov, A. D. Barinov, V. M. Yemets, D. A. Zezin, T. S. Chukanova, V. P. Afanas'ev, M. A. Semenov-Shefov, V. A. Terekhov, E. P. Domashevskaya, M. Yu. Presnyakov, M. A. Shapetina, “Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 11, 24  crossref
    2. A. I. Popov, A. D. Barinov, V. M. Yemets, M. Yu. Presnyakov, T. S. Chukanova, “Field Frequency Variation during Plasma-Chemical Deposition of Silicon-Carbon Films as a Method for Their Structural Modification”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 10, 22  crossref
    3. A. I. Popov, A. D. Barinov, V. M. Yemets, D. A. Zezin, T. S. Chukanova, V. P. Afanas'ev, M. A. Semenov-Shefov, V. A. Terekhov, E. P. Domashevskaya, M. Yu. Presnyakov, M. A. Shapetina, “Effect of Aluminum on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films”, J. Surf. Investig., 17:6 (2023), 1199  crossref
    4. Tatiana Chukanova, Alexei Barinov, Vladimir Yemets, Denis Zezin, Anatoly Popov, 2023 5th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE), 2023, 1  crossref
    5. A. I. Popov, A. D. Barinov, V. M. Yemets, M. Yu. Presnyakov, T. S. Chukanova, “Field-Frequency Variation during Plasma-Chemical Deposition of Silicon–Carbon Films as a Method for Their Structural Modification”, J. Surf. Investig., 17:5 (2023), 1060  crossref
    6. V. K. Dmitriev, E. A. Il'ichev, G. G. Kirpilenko, G. N. Petrukhin, G. S. Rychkov, V. D. Frolov, “Characteristics and Areas of Possible Application of Amorphous Silicon–Carbon and Metal–Silicon–Carbon Films. Review”, Semiconductors, 57:1 (2023), 11  crossref
    7. A. I. Popov, A. D. Barinov, V. M. Emets, R. A. Kastro Arta, A. V. Kolobov, A. A. Kononov, A. V. Ovcharov, T. S. Chukanova, “The Effect of Transition Metals on the Dielectric Properties of Diamond-Like Silicon–Carbon Films”, Phys. Solid State, 64:2 (2022), 85  crossref
    Citing articles in Google Scholar: Russian citations, English citations
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