A. I. Popov, A. D. Barinov, V. M. Yemets, R. A. Kastro, A. V. Kolobov, A. A. Kononov, A. V. Ovcharov, T. S. Chukanova, “Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films”, Fizika Tverdogo Tela, 63:11 (2021), 1844

Loading [MathJax]/jax/output/SVG/config.js

Fizika Tverdogo Tela

RUS ENG

JOURNALS PEOPLE ORGANISATIONS CONFERENCES SEMINARS VIDEO LIBRARY PACKAGE AMSBIB

JavaScript is disabled in your browser. Please switch it on to enable full functionality of the website

	General information
	Latest issue
	Archive

	Search papers
	Search references

	RSS
	Latest issue
	Current issues
	Archive issues
	What is RSS

Fizika Tverdogo Tela:
Year:
Volume:
Issue:
Page:
	Find

Personal entry:
Login:
Password:
	Save password
	Enter
	Forgotten password?
	Register

Fizika Tverdogo Tela, 2021, Volume 63, Issue 11, Pages 1844–1851
DOI: https://doi.org/10.21883/FTT.2021.11.51586.132 (Mi ftt7957)

This article is cited in 2 scientific papers (total in 2 papers)

Continued publication of the materials of the seminar in FTT N 12/21
Semiconductors

Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films

A. I. Popov^ab, A. D. Barinov^ab, V. M. Yemets^a, R. A. Kastro^c, A. V. Kolobov^c, A. A. Kononov^c, A. V. Ovcharov^d, T. S. Chukanova^a

^a National Research University "Moscow Power Engineering Institute", Moscow, Russia
^b Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow, Russia
^c Herzen State Pedagogical University of Russia, St. Petersburg, Russia
^d National Research Centre "Kurchatov Institute", Moscow, Russia

Full-text PDF (793 kB) Citations (2)

DOI: https://doi.org/10.21883/FTT.2021.11.51586.132

Abstract: Investigation of transition metals effect on the phase composition, electrical and dielectric properties of diamond-like silicon-carbon films prepared by the plasma-chemical decomposition of polyphenylmethylsiloxane have been carried out. Frequency, temperature and concentration dependences of these properties are obtained. It is shown that an increase in the metal concentration in the film leads to a continuous increase in the electrical conductivity, while the concentration dependences of the dielectric constant and the dielectric loss tangent have a minimum at metal concentrations of 0.5–2 at.%. Possible reasons for this phenomenon are analyzed.

Keywords: silicon-carbon films, transition metals, structure, electrical conductivity, dielectric constant, dielectric losses, concentration dependences, polarization.

Funding agency	Grant number
Russian Foundation for Basic Research	19-07-00021

Received: 28.05.2021
Revised: 28.05.2021
Accepted: 10.06.2021

Bibliographic databases:

Document Type: Article

Language: Russian

Citation: A. I. Popov, A. D. Barinov, V. M. Yemets, R. A. Kastro, A. V. Kolobov, A. A. Kononov, A. V. Ovcharov, T. S. Chukanova, “Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films”, Fizika Tverdogo Tela, 63:11 (2021), 1844–1851

Citation in format AMSBIB

\Bibitem{PopBarYem21}

\by A.~I.~Popov, A.~D.~Barinov, V.~M.~Yemets, R.~A.~Kastro, A.~V.~Kolobov, A.~A.~Kononov, A.~V.~Ovcharov, T.~S.~Chukanova

\paper Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films

\jour Fizika Tverdogo Tela

\yr 2021

\vol 63

\issue 11

\pages 1844--1851

\mathnet{http://mi.mathnet.ru/ftt7957}

\crossref{https://doi.org/10.21883/FTT.2021.11.51586.132}

\elib{https://elibrary.ru/item.asp?id=46636897}

Linking options:

https://www.mathnet.ru/eng/ftt7957

https://www.mathnet.ru/eng/ftt/v63/i11/p1844

This publication is cited in the following 2 articles:

A. I. Popov, A. D. Barinov, V. M. Yemets, M. Yu. Presnyakov, T. S. Chukanova, “Field Frequency Variation during Plasma-Chemical Deposition of Silicon-Carbon Films as a Method for Their Structural Modification”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 10, 22
A. I. Popov, A. D. Barinov, V. M. Yemets, D. A. Zezin, T. S. Chukanova, V. P. Afanas'ev, M. A. Semenov-Shefov, V. A. Terekhov, E. P. Domashevskaya, M. Yu. Presnyakov, M. A. Shapetina, “Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 11, 24

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

Statistics & downloads:
Abstract page:	113
Full-text PDF :	52

Registration to the website

Logotypes