Abstract:
Investigation of transition metals effect on the phase composition, electrical and dielectric properties of diamond-like silicon-carbon films prepared by the plasma-chemical decomposition of polyphenylmethylsiloxane have been carried out. Frequency, temperature and concentration dependences of these properties are obtained. It is shown that an increase in the metal concentration in the film leads to a continuous increase in the electrical conductivity, while the concentration dependences of the dielectric constant and the dielectric loss tangent have a minimum at metal concentrations of 0.5–2 at.%. Possible reasons for this phenomenon are analyzed.
Citation:
A. I. Popov, A. D. Barinov, V. M. Yemets, R. A. Kastro, A. V. Kolobov, A. A. Kononov, A. V. Ovcharov, T. S. Chukanova, “Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films”, Fizika Tverdogo Tela, 63:11 (2021), 1844–1851
\Bibitem{PopBarYem21}
\by A.~I.~Popov, A.~D.~Barinov, V.~M.~Yemets, R.~A.~Kastro, A.~V.~Kolobov, A.~A.~Kononov, A.~V.~Ovcharov, T.~S.~Chukanova
\paper Effect of transition metals on the dielectric properties of diamond-like silicon-carbon films
\jour Fizika Tverdogo Tela
\yr 2021
\vol 63
\issue 11
\pages 1844--1851
\mathnet{http://mi.mathnet.ru/ftt7957}
\crossref{https://doi.org/10.21883/FTT.2021.11.51586.132}
\elib{https://elibrary.ru/item.asp?id=46636897}
Linking options:
https://www.mathnet.ru/eng/ftt7957
https://www.mathnet.ru/eng/ftt/v63/i11/p1844
This publication is cited in the following 2 articles:
A. I. Popov, A. D. Barinov, V. M. Yemets, M. Yu. Presnyakov, T. S. Chukanova, “Field Frequency Variation during Plasma-Chemical Deposition of Silicon-Carbon Films as a Method for Their Structural Modification”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 10, 22
A. I. Popov, A. D. Barinov, V. M. Yemets, D. A. Zezin, T. S. Chukanova, V. P. Afanas'ev, M. A. Semenov-Shefov, V. A. Terekhov, E. P. Domashevskaya, M. Yu. Presnyakov, M. A. Shapetina, “Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films”, Poverkhnost. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya, 2023, no. 11, 24