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Физика и техника полупроводников, 2018, том 52, выпуск 5, страница 524
(Mi phts5850)
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Эта публикация цитируется в 4 научных статьях (всего в 4 статьях)
XXV International Symposium ''Nanostructures: Physics and Technology'', Saint Petersburg, June 26-30, 2017
Nanostructure Technology
Growth of GaN layers on Si(111) substrates by plasma-assisted molecular beam epitaxy
Sergei Timoshnev, Andrey Mizerov, Maxim Sobolev, Ekaterina Nikitina St. Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia
Аннотация:
The studies of the growth kinetics of GaN layers grown on nitridated Si(111) substrates by plasmaassisted molecular beam epitaxy are presented. The nucleation and overgrowth of the separate GaN/Si(111) nanocolumns during single growth run is demonstrated. The technique of the in situ control of the GaN/Si(111) nanocolumns lateral size is proposed.
Образец цитирования:
Sergei Timoshnev, Andrey Mizerov, Maxim Sobolev, Ekaterina Nikitina, “Growth of GaN layers on Si(111) substrates by plasma-assisted molecular beam epitaxy”, Физика и техника полупроводников, 52:5 (2018), 524; Semiconductors, 52:5 (2018), 660–663
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/phts5850 https://www.mathnet.ru/rus/phts/v52/i5/p524
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Страница аннотации: | 39 | PDF полного текста: | 17 |
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