|
Nonlinear physics and mechanics
MEMS Sensor of Force
R. Hart'anskýa, J. Hrickob, M. Mierkaa, J. Halgoša, M. Dzuriša a Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology,
Slovak University of Technology, Bratislava, Slovakia
b Institute of Informatics, Slovak Academy of Sciences
Banska Bystrica, Slovakia
Аннотация:
The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.
Ключевые слова:
compact compliant mechanical body, mechanical force sensor, transfer response.
Поступила в редакцию: 31.05.2019 Принята в печать: 01.10.2019
Образец цитирования:
R. Hart'anský, J. Hricko, M. Mierka, J. Halgoš, M. Dzuriš, “MEMS Sensor of Force”, Rus. J. Nonlin. Dyn., 16:1 (2020), 85–92
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/nd698 https://www.mathnet.ru/rus/nd/v16/i1/p85
|
Статистика просмотров: |
Страница аннотации: | 94 | PDF полного текста: | 49 | Список литературы: | 22 |
|