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Эта публикация цитируется в 2 научных статьях (всего в 2 статьях)
CHEMISTRY AND MATERIAL SCIENCE
Ultraviolet and visible reflective TiO$_{2}$/SiO$_{2}$ thin films on silicon using sol-gel spin coater
S. Saravanan, R. S. Dubey Advanced Research Laboratory for Nanomaterials & Devices, Department of Nanotechnology, Swarnandhra College of Engineering & Technology, Narsapur-534 280, West Godavari (A.P.), India
Аннотация:
TiO$_{2}$SiO$_{2}$ alternative thin films (stacks) were deposited on silicon substrates using sol-gel spin-coating techniques. The prepared samples had their corresponding optical properties analyzed by UV-Visible spectrophotometry (UV-Vis), X-ray diffractometry (XRD), a surface profilometer, and Raman spectroscopy. The optical and crystallization properties of thin films were varied and compared by changing the number of stacks. UV-Vis spectrum showed high reflectance and shifting towards the infrared region with effect of increased TiO$_{2}$/SiO$_{2}$ stacks. XRD spectra confirmed the existence of anatase TiO$_{2}$ and SiO$_{2}$ diffraction peaks. The multilayer film thickness was calculated at 109 and 151 nm at two and four stacks by a surface profilometer. The Raman spectra confirmed the Si-O-Si and TiO$_{2}$ stretching modes at 2600, 980, and 519 cm$^{-1}$. This investigation reveals the promising and effective UV-Visible reflective property of alternative TiO$_{2}$/SiO$_{2}$ thin films on a silicon substrate.
Ключевые слова:
Sol-gel, reflectance, multilayer, anatase, thickness.
Поступила в редакцию: 12.11.2020 Исправленный вариант: 20.03.2021
Образец цитирования:
S. Saravanan, R. S. Dubey, “Ultraviolet and visible reflective TiO$_{2}$/SiO$_{2}$ thin films on silicon using sol-gel spin coater”, Наносистемы: физика, химия, математика, 12:3 (2021), 311–316
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/nano1027 https://www.mathnet.ru/rus/nano/v12/i3/p311
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Страница аннотации: | 118 | PDF полного текста: | 119 |
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