Kinetic regularities of solid phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293K

In studies of the initiated ignition of dichlorosilane−oxygen mixtures it has been shown that rf discharge applied before ignition leads to an increase in the lifetime of aerosol particles in the reactor volume, in contrast to direct current discharge which markedly decreases the amount of aerosol particles formed in ignition. Ordered structures of the type of ′liquid dust crystal′ have been detected in rf plasma of branching-chain heterophaseous reaction.