P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser”, J. Opt. Soc. Am. B, 25, № 7, 2008, B104
T.W. Zhang, S. Boyd, A. Vijayaraghavan, D. Dornfeld, Proceedings of the 2006 IEEE International Symposium on Electronics and the Environment, 2006., 2006, 266
Jianmin Long, Weike Yuan, Wen Chen, Gangfeng Wang, “Analytic relations for two-dimensional indentations with surface tension”, Mechanics of Materials, 119, 2018, 34
L. James Lee, “Polymer Nanoengineering for Biomedical Applications”, Ann Biomed Eng, 34, № 1, 2006, 75
Khanh T.M. Tran, Thanh D. Nguyen, “Lithography-based methods to manufacture biomaterials at small scales”, Journal of Science: Advanced Materials and Devices, 2, № 1, 2017, 1
Hua Zhang, Ki-Bum Lee, Zhi Li, Chad A Mirkin, “Biofunctionalized nanoarrays of inorganic structures prepared by dip-pen nanolithography”, Nanotechnology, 14, № 10, 2003, 1113
Self-Assembled Nanostructures, 2004, 157
J. Raczkowska, A. Bernasik, A. Budkowski, J. Rysz, K. Kowalski, M. Lekka, P. Czuba, J. Lekki, “Pattern replication examined with integral geometry approach: application to ion milling of polymer blend films”, Thin Solid Films, 476, № 2, 2005, 358
B. Bhuian, R.J. Winfield, G.M. Crean, “Laser polymerization-based novel lift-off technique”, Applied Surface Science, 255, № 10, 2009, 5150
Qingzhen Yang, Ben Q. Li, Yucheng Ding, “A numerical study of nanoscale electrohydrodynamic patterning in a liquid film”, Soft Matter, 9, № 12, 2013, 3412