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Publications in Math-Net.Ru |
Citations |
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1990 |
| 1. |
K. A. Valiev, H. Zeyfarth, D. R. Ilkayev, T. M. Makhviladze, “Modellinc and optimization of the optical schemes of the photolithography systems”, Matem. Mod., 2:1 (1990), 56–75  |
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K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, D. R. Ilkayev, V. E. Matyushkov, T. M. Makhviladze, A. A. Shalapenok, “Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator”, Kvantovaya Elektronika, 17:4 (1990), 512–516 [Sov J Quantum Electron, 20:4 (1990), 446–450  ] |
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