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Publications in Math-Net.Ru |
Citations |
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1991 |
| 1. |
T. M. Makhviladze, E. G. Panteleev, M. E. Sarychev, “Theoretical study of polymer resist direct etching by heavy ions of average energy”, Matem. Mod., 3:1 (1991), 11–17  |
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1990 |
| 2. |
T. M. Makhviladze, E. G. Panteleev, M. E. Sarychev, “Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement”, Matem. Mod., 2:3 (1990), 3–14 |
| 3. |
K. A. Valiev, H. Zeyfarth, D. R. Ilkayev, T. M. Makhviladze, “Modellinc and optimization of the optical schemes of the photolithography systems”, Matem. Mod., 2:1 (1990), 56–75 |
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| 4. |
K. A. Valiev, L. V. Velikov, G. S. Volkov, D. Yu. Zaroslov, D. R. Ilkayev, V. E. Matyushkov, T. M. Makhviladze, A. A. Shalapenok, “Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator”, Kvantovaya Elektronika, 17:4 (1990), 512–516 [Sov J Quantum Electron, 20:4 (1990), 446–450  ] |
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1989 |
| 5. |
T. M. Makhviladze, E. G. Panteleev, M. E. Sarychev, “Modelling of the surface mass ejection for irradiated polymeric resistors”, Matem. Mod., 1:10 (1989), 70–79  |
| 6. |
M. V. Bochkov, T. M. Makhviladze, S. B. Pekarchuk, B. N. Chetverushkin, “Numerical modelling of etching of polymers in an oxygen-containing atmosphere”, Matem. Mod., 1:2 (1989), 1–13 |
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1986 |
| 7. |
K. A. Valiev, T. M. Makhviladze, M. E. Sarychev, “MECHANISM OF THE POLYMER FILM ETCHING IN THE LOW-TEMPERATURE PLASMA”, Zhurnal Tekhnicheskoi Fiziki, 56:7 (1986), 1329–1335 |
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1985 |
| 8. |
Yu. B. Amerik, K. A. Valiev, L. V. Velikov, S. D. Dushenkov, T. M. Makhviladze, A. M. Prokhorov, L. A. Shirokova, “Direct photo etching of polymers under conditions of macromolecule chain
unzipping”, Dokl. Akad. Nauk SSSR, 280:5 (1985), 1106–1110 |
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1983 |
| 9. |
T. M. Makhviladze, M. E. Sarychev, “Raman light scattering on phonon solitons in crystals”, Fizika Tverdogo Tela, 25:6 (1983), 1717–1719 |
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1977 |
| 10. |
T. M. Makhviladze, I. G. Sinitsyn, L. A. Shelepin, “Transient processes in propagation of an ultrashort pulse in a three-level medium”, Kvantovaya Elektronika, 4:6 (1977), 1313–1317 [Sov J Quantum Electron, 7:6 (1977), 739–741] |
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