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Publications in Math-Net.Ru |
Citations |
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2024 |
| 1. |
A. I. Artyukhov, S. S. Morozov, D. V. Petrova, N. I. Chkhalo, R. A. Shaposhnikov, “The Maskless litographer of direct drawing. Design, structure and application”, Zhurnal Tekhnicheskoi Fiziki, 94:8 (2024), 1295–1301   |
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2023 |
| 2. |
D. V. Petrova, M. S. Mikhailenko, M. V. Zorina, M. N. Drozdov, A. E. Pestov, N. I. Chkhalo, “The coating a liquid glass of the optical element substrates and its molecular composition”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1037–1045 |
| 3. |
D. G. Reunov, N. S. Gusev, M. S. Mikhailenko, D. V. Petrova, I. V. Malyshev, N. I. Chkhalo, “Substrates for soft X-ray microscopy based on Si$_3$N$_4$ membranes”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1032–1036 |
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