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Publications in Math-Net.Ru |
Citations |
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2023 |
| 1. |
V. V. Emelyanov, A. N. Kupo, V. A. Emelyanov, “Phenomenological model of metal coating etching in a gas mixtured plasma”, PFMT, 2023, no. 4(57), 69–73  |
| 2. |
A. N. Kupo, V. V. Emelyanov, V. A. Emelyanov, “Modeling of ir radiation influence on the phase composition of silicon dioxide coatings”, PFMT, 2023, no. 3(56), 64–68 |
| 3. |
V. V. Emelyanov, A. N. Kupo, V. A. Emelyanov, “Modeling of plasma-chemical etching of silicon nitride functional layer on silicon dioxide sublayer in microelectronics technologies”, PFMT, 2023, no. 3(56), 60–63 |
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