P. B. Boldyrevskii, A. G. Korovin, S. A. Denisov, S. P. Svetlov, V. G. Shengurov, “Analysis of thickness unevenness of the epitaxial silicon layer during deposition from sublimation sources in a vacuum”, University proceedings. Volga region. Physical and mathematical sciences, 2015, no. 4, 93–100
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