N. A. Andrianov, A. A. Kobelev, A. S. Smirnov, Yu. V. Barsukov, Yu. M. Zhukov, “Influence of surface processing in a BCl$_3$ plasma on the formation of ohmic contacts to AlGaN/GaN structures”, Zhurnal Tekhnicheskoi Fiziki, 87:3 (2017), 413–418; Tech. Phys., 62:3 (2017), 436–440
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