M. S. Tuzhilkin, P. G. Bespalova, M. V. Mishin, I. E. Kolesnikov, K. V. Karabeshkin, P. A. Karaseov, A. I. Titov, “Formation of Au nanoparticles and features of etching of a Si substrate under irradiation with atomic and molecular ions”, Fizika i Tekhnika Poluprovodnikov, 54:1 (2020), 90–96; Semiconductors, 54:1 (2020), 137–143
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