Persons: Zhang, X-M

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Zhang, X-M

	Publications in Math-Net.Ru	Citations
	2021
1.	X.-M. Zhang, C.-L. Yan, G.-H. Yu, C.-H. Zeng, T.-Y. Sun, Z. Xing, Y.-Q. Wang, J.-H. Yang, B.-S. Zhang, “High-quality etching of GaN materials with extremely slow rate and low damage”, Fizika i Tekhnika Poluprovodnikov, 55:3 (2021), 289 ; Semiconductors, 55:3 (2021), 387–393

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